Fabricating a MEMS Pressure Sensor – You Can Do This!
Fabricating a MEMS Pressure Sensor – You Can Do This!
-
1. Fabricating a MEMS Pressure Se…
0
00:00/00:00
-
2. What are MEMS Pressure Sensors…
109.90990990990991
00:00/00:00
-
3. Why do we care?
187.4874874874875
00:00/00:00
-
4. Who Makes These?
324.55789122455792
00:00/00:00
-
5. Pressure Sensor Application
375.70904237570903
00:00/00:00
-
6. A Cool App for your phone Chec…
504.8048048048048
00:00/00:00
-
7. Pressure Sensor How it Works
634.36770103436777
00:00/00:00
-
8. MTTC Pressure Sensor Process O…
730.33033033033041
00:00/00:00
-
9. SCME/MTTC Pressure Sensor Proc…
940.60727394060734
00:00/00:00
-
10. Backside Pattern (Chamber) –…
1167.3673673673675
00:00/00:00
-
11. Photolithography
1264.7313980647314
00:00/00:00
-
12. Wafer Prep Deposition
1412.1121121121121
00:00/00:00
-
13. Wafer Prep QDR/SRD Deposition
1478.0780780780781
00:00/00:00
-
14. Coat
1657.4574574574576
00:00/00:00
-
15. Expose
1775.3753753753754
00:00/00:00
-
16. Develop
1869.5695695695697
00:00/00:00
-
17. Microscope Inspection
1998.4651317984651
00:00/00:00
-
18. Profilometer Inspection - DekT…
2047.4140807474141
00:00/00:00
-
19. After Pattern, Before RIE Etch…
2129.7964631297964
00:00/00:00
-
20. Program
2218.5185185185187
00:00/00:00
-
21. After first 5min
2336.9703036369706
00:00/00:00
-
22. After Etch before Resist Strip
2396.0960960960961
00:00/00:00
-
23. Etch Inspect
2487.354020687354
00:00/00:00
-
24. Selectivity: What you want etc…
2523.5568902235568
00:00/00:00
-
25. Backside is now etched
2595.4621287954624
00:00/00:00
-
26. Frontside Pattern – Dark or …
2624.0573907240573
00:00/00:00
-
27. Karl Suss MA6/BA6
2742.375709042376
00:00/00:00
-
28. Backside Alignment Microscopes
2746.9135802469136
00:00/00:00
-
29. Pattern the Wheatstone Bridge
2841.4414414414414
00:00/00:00
-
30. Alignment Details
2960.06006006006
00:00/00:00
-
31. Photolithography – Liftoff L…
2991.7917917917921
00:00/00:00
-
32. LOR5b Results - Inspect
3049.5161828495161
00:00/00:00
-
33. Photolithography – Liftoff n…
3117.1171171171172
00:00/00:00
-
34. nLOF2070 Results
3225.3253253253256
00:00/00:00
-
35. So Far....
3257.3573573573576
00:00/00:00
-
36. Sputter – CrAu or NiCr
3302.902902902903
00:00/00:00
-
37. Load
3434.7013680347013
00:00/00:00
-
38. Load Wafer in Load Lock
3463.2632632632635
00:00/00:00
-
39. Sputter Wafer Stage and Target
3520.387053720387
00:00/00:00
-
40. Select
3554.421087754421
00:00/00:00
-
41. Metal on Photoresist
3576.50984317651
00:00/00:00
-
42. Liftoff
3632.1321321321325
00:00/00:00
-
43. Inspect
3738.2716049382716
00:00/00:00
-
44. What's Next?
3745.7791124457794
00:00/00:00
-
45. Chamber Etch – Anisotropic W…
3748.7487487487488
00:00/00:00
-
46. Singulation
3890.3236569903238
00:00/00:00
-
47. Dicing
3943.7103770437107
00:00/00:00
-
48. Probe
4031.6649983316652
00:00/00:00
-
49. • • • • WWW.SCME-SUPPO…
4191.0243576910243
00:00/00:00
-
50. NEW: URE - UNDERGRADUATE RESEA…
4322.7560894227563
00:00/00:00
-
51. MNTESIG COMMUNITY
4544.377711044378
00:00/00:00
-
52. Want to Give it a shot?
4765.5321988655323
00:00/00:00
-
53. QUESTIONS?
4851.2512512512512
00:00/00:00