Matthias Pleil, Ph.D. is the Principal Investigator for two National Science Foundation funded centers, the Southwest Center for Microsystems Education (SCME, since 2004) and the Support Center for Microsystems Education (2017). He is a Research Professor of Mechanical Engineering and the MTTC Cleanroom Manager at the University of New Mexico. He teaches several undergraduate engineering classes and promotes micro and nanotechnology. Previously he was a faculty member at Central New Mexico Community College in both the Schools of Applied Technologies and Math, Science and Engineering (MSE) where he taught Microsystems Fabrication and Design, Survey of Engineering and Physics. He has over 12 years of experience in Semiconductor Manufacturing from both Texas Instruments and Philips Semiconductors, where he worked as a Senior Process and Equipment Engineer and Engineering Manager in Photolithography, Yield, and Metrology. Dr. Pleil received his Ph.D. in Physics in 1993 from Texas Tech University, where he completed original research on Time-Resolved Fluorescence Spectroscopy.

Center for Nanotechnology Education and Utilization (CNEU)

Researchers should cite this work as follows:

• Matthias Pleil, NACK Network (2022), "Fabricating a MEMS Pressure Sensor – You Can Do This!," https://nanohub.org/resources/36242.

  BibTex | EndNote

1. ATE Centers
2. deposition
3. etching
4. fabrication
5. MEMS
6. NACK Network
7. photolithography
8. pressure sensor
9. sensors/sensing