ME 290R Lecture 9: Lithography for MEMS and Microfluidics

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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  • Taylor, Hayden (2019), "ME 290R Lecture 9: Lithography for MEMS and Microfluidics," https://nanohub.org/resources/30430.

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Tags

  1. lithography
  2. Nano Electro-Mechanical Systems (NEMS)
  3. nanofluidics
  4. nanomanufacturing
  5. nanoMFG Node
  6. NEMS/MEMS
  7. processing
ME 290R Lecture 9: Lithography for MEMS and Microfluidics
  • Lecture 9: Lithography for MEMS and microfluidics 1. Lecture 9: Lithography for MEM… 0
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  • Lithography for MEMS and microfluidics 2. Lithography for MEMS and micro… 20.85418752085419
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  • The LIGA process 3. The LIGA process 86.353019686353022
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  • Variants of LIGA 4. Variants of LIGA 1512.1121121121121
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  • Applications of LIGA 5. Applications of LIGA 1583.1164497831164
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  • Applications of LIGA 6. Applications of LIGA 1751.1845178511846
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  • X-ray LIGA and examples of its use 7. X-ray LIGA and examples of its… 1760.1601601601603
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  • X-Ray Mask 8. X-Ray Mask 1849.7831164497832
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  • Edge definition in X-ray LIGA 9. Edge definition in X-ray LIGA 1966.8335001668336
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  • X-ray LIGA needs a synchrotron light source 10. X-ray LIGA needs a synchrotron… 2118.0180180180182
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  • Examples of UV LIGA using SU-8 as the resist 11. Examples of UV LIGA using SU-8… 2185.1184517851184
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  • Injection molding for micron-scale pattern replication 12. Injection molding for micron-s… 2251.2846179512849
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  • Injection molding for micron-scale pattern replication 13. Injection molding for micron-s… 2628.9289289289291
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  • Micro-casting for device fabrication 14. Micro-casting for device fabri… 2728.3616950283617
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  • Plasma-activated bonding for PDMS 15. Plasma-activated bonding for P… 2908.7754421087757
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  • Advantages of PDMS for microfluidics fabrication 16. Advantages of PDMS for microfl… 3122.4891558224895
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  • Disadvantages of PDMS for microfluidics fabrication 17. Disadvantages of PDMS for micr… 3197.4641307974643
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  • Valves and pumps made with multilayer soft lithography 18. Valves and pumps made with mul… 3203.5368702035371
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  • Microfluidic large-scale integration 19. Microfluidic large-scale integ… 3352.8862195528864
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