ME 290R Lecture 9: Lithography for MEMS and Microfluidics

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 9: Lithography for MEMS and Microfluidics," https://nanohub.org/resources/30430.

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Tags

  1. lithography
  2. Nano Electro-Mechanical Systems (NEMS)
  3. nanofluidics
  4. nanomanufacturing
  5. nanoMFG Node
  6. NEMS/MEMS
  7. processing