GHz CMOS-MEMS Resonators

By Dana Weinstein

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Birck Nanotechnology Center

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Researchers should cite this work as follows:

  • Dana Weinstein (2018), "GHz CMOS-MEMS Resonators," https://nanohub.org/resources/28370.

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Room 2001, Birck Nanotechnology Center, Purdue University, West Lafayette, IN

GHz CMOS-MEMS Resonators
  • GHz CMOS-MEMS resonators 1. GHz CMOS-MEMS resonators 0
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  • Motivation: Frequency Sources 2. Motivation: Frequency Sources 32.799466132799466
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  • Frequency Sources and Filters > 10GHz 3. Frequency Sources and Filters … 79.379379379379387
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  • Toward monolithic frequency sources 4. Toward monolithic frequency so… 137.671004337671
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  • CMOS-friendly resonator transduction 5. CMOS-friendly resonator transd… 405.90590590590591
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  • CMOS-friendly resonator transduction 6. CMOS-friendly resonator transd… 582.94961628294959
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  • Dielectric transduction 7. Dielectric transduction 605.50550550550554
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  • Dielectric transduction 8. Dielectric transduction 713.88054721388062
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  • Resonant Body Transistor (RBT) 9. Resonant Body Transistor (RBT) 918.88555221888555
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  • RBT equivalent circuit 10. RBT equivalent circuit 1082.0153486820154
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  • Resonant Body Transistors 11. Resonant Body Transistors 1204.8048048048049
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  • CMOS Integration of Si MEMS 12. CMOS Integration of Si MEMS 1351.951951951952
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  • Unreleased RBTs in 32SOI CMOS 13. Unreleased RBTs in 32SOI CMOS 1461.0276943610277
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  • Phononic Crystal based RBTs 14. Phononic Crystal based RBTs 1603.26993660327
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  • PnC Waveguided Modes 15. PnC Waveguided Modes 1739.0390390390392
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  • PnC Waveguided Modes 16. PnC Waveguided Modes 1903.4034034034034
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  • Waveguided RBT 17. Waveguided RBT 1944.8782115448782
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  • Waveguided RBT 18. Waveguided RBT 1999.1658324991658
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  • Resonant Fin Transistors 19. Resonant Fin Transistors 2045.8124791458126
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  • BEOL Reflector in GF 14nm FinFET Technology 20. BEOL Reflector in GF 14nm FinF… 2165.865865865866
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  • Bottom Confinement & Dispersion Characteristics 21. Bottom Confinement & Dispersio… 2214.0807474140806
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  • Mode Shape & RFT Structure 22. Mode Shape & RFT Structure 2245.0784117450785
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  • Resonant Fin Transistor Unit Cell 23. Resonant Fin Transistor Unit C… 2318.2515849182519
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  • SEM Micrograph 24. SEM Micrograph 2450.9509509509512
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  • Circuit Configuration of the RFT 25. Circuit Configuration of the R… 2499.4661327994663
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  • RF Measurement Results 26. RF Measurement Results 2529.82982982983
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  • Conclusion 27. Conclusion 2669.7030363697031
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  • Acknowledgements 28. Acknowledgements 2788.154821488155
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