GHz CMOS-MEMS Resonators

By Dana Weinstein

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Cite this work

Researchers should cite this work as follows:

  • Dana Weinstein (2018), "GHz CMOS-MEMS Resonators," https://nanohub.org/resources/28370.

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Room 2001, Birck Nanotechnology Center, Purdue University, West Lafayette, IN