09 Demonstration of Vertical GaN PN Diode with Step-etched Triple zone JTE
Demonstration of Vertical GaN PN Diode with Step-etched Triple zone JTE
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1. Demonstration of Vertical GaN …
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2. Outline
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3. Introduction
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4. Edge Termination for Vertical …
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5. Edge Termination for Vertical …
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6. Current Status for GaN Edge Te…
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7. Outline
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8. Design of Junction Termination…
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9. Design of Junction Termination…
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10. Outline
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11. Epitaxial Design
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12. Doping and C-V Characterizatio…
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13. Fabrication of vertical GaN pn…
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14. Forward Characteristics
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15. Reverse Characteristics
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16. Device Breakdown - Statistics
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17. Experimental versus Simulated …
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18. Conclusion
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19. Thank you
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