ME 290R Lecture 13.1: Emerging X-ray and Optical-based Lithography Techniques I

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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  • Taylor, Hayden (2019), "ME 290R Lecture 13.1: Emerging X-ray and Optical-based Lithography Techniques I," https://nanohub.org/resources/30516.

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  1. lithography
  2. nanomanufacturing
  3. nanoMFG Node
  4. optical lithography
  5. processing
  6. x-ray lithography
ME 290R Lecture 13.1: Emerging X-ray and Optical-based Lithography Techniques I
  • Lecture 13.1: Emerging  X-ray and Optical-based Lithography Techniques I 1. Lecture 13.1: Emerging  X-ra… 0
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  • Emerging optical/x-ray based methods 2. Emerging optical/x-ray based m… 12.479145812479146
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  • X-ray zone plate array lithography 3. X-ray zone plate array lithogr… 35.802469135802468
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  • Zone plate array lithography with light 4. Zone plate array lithography w… 308.04137470804136
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  • Zone plate arrays 5. Zone plate arrays 583.11644978311642
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  • Near-field techniques 6. Near-field techniques 586.15281948615279
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  • Intensity 7. Intensity "dip" 605.47213880547213
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  • Intensity 8. Intensity "dip" 771.30463797130471
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  • Embossed resist as its own optical element 9. Embossed resist as its own opt… 803.23656990323661
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  • Roll-to-roll photolithography 10. Roll-to-roll photolithography 926.0593927260594
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  • Roll-to-roll photolithography 11. Roll-to-roll photolithography 951.01768435101769
    00:00/00:00
  • Roll-to-roll photolithography 12. Roll-to-roll photolithography 1133.1664998331667
    00:00/00:00
  • Frequency multiplication based on EUV near-field imaging 13. Frequency multiplication based… 1481.1144477811145
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  • Printing color at the nanoscale 14. Printing color at the nanoscal… 1485.1184517851184
    00:00/00:00
  • Printing color at the nanoscale 15. Printing color at the nanoscal… 1769.3693693693695
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  • Printing color at the nanoscale 16. Printing color at the nanoscal… 1900.8341675008342
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  • Interference lithography 17. Interference lithography 1908.8421755088423
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  • 2D arrays are possible by interfering multiple beams 18. 2D arrays are possible by inte… 2167.2672672672675
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  • Sequential exposures 19. Sequential exposures 2179.7464130797466
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  • Interference lithography for EUV 20. Interference lithography for E… 2231.3646980313647
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  • Printing arbitrary patterns by interference lithography 21. Printing arbitrary patterns by… 2322.288955622289
    00:00/00:00
  • Printing arbitrary patterns by interference lithography 22. Printing arbitrary patterns by… 2579.7464130797466
    00:00/00:00
  • Printing arbitrary patterns by interference lithography 23. Printing arbitrary patterns by… 2585.151818485152
    00:00/00:00
  • 3D projection lithography approaches 24. 3D projection lithography appr… 2653.11978645312
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  • Controlling focal point in projection lithography 25. Controlling focal point in pro… 2725.5588922255588
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  • Controlling focal point in projection lithography 26. Controlling focal point in pro… 2862.6960293626962
    00:00/00:00
  • Photolithography on optical fibers 27. Photolithography on optical fi… 2870.3036369703036
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