ME 290R Lecture 13.1: Emerging X-ray and Optical-based Lithography Techniques I

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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  • Taylor, Hayden (2019), "ME 290R Lecture 13.1: Emerging X-ray and Optical-based Lithography Techniques I," https://nanohub.org/resources/30516.

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Tags

  1. lithography
  2. nanomanufacturing
  3. nanoMFG Node
  4. optical lithography
  5. processing
  6. x-ray lithography