ME 290R Lecture 12.1: Scanning-beam Lithography and Directed Self-assembly I

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

View Presentation

Additional materials available (4)

Category

Online Presentations

Published on

Cite this work

Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 12.1: Scanning-beam Lithography and Directed Self-assembly I," https://nanohub.org/resources/30498.

    BibTex | EndNote

Time

Tags

  1. lithography
  2. nanomanufacturing
  3. nanoMFG Node
  4. processing
  5. scanning-beam lithography
  6. self-assembly