ME 290R Lecture 6.1: Nanoimprint Lithography - Machine Design I

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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  • Taylor, Hayden (2019), "ME 290R Lecture 6.1: Nanoimprint Lithography - Machine Design I," https://nanohub.org/resources/30336.

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  1. lithography
  2. nano imprinting
  3. nanoimprint lithography
  4. nanomanufacturing
  5. nanoMFG Node
  6. processing
ME 290R Lecture 6.1: Nanoimprint Lithography - Machine Design I
  • Lecture 6.1: Nanoimprint Lithography – Machine Design I 1. Lecture 6.1: Nanoimprint Lith… 0
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  • Machine design considerations 2. Machine design considerations 16.016016016016017
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  • Alignment, registration and overlay 3. Alignment, registration and ov… 184.91825158491827
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  • Moire-based alignment 4. Moire-based alignment 185.8858858858859
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  • Early Moire work - 2006 5. Early Moire work - 2006 188.85552218885553
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  • Scatterometry for precise alignment 6. Scatterometry for precise alig… 239.07240573907242
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  • Local heating of stamp to correct overlay errors 7. Local heating of stamp to corr… 403.50350350350351
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  • Local heating of stamp to correct overlay errors 8. Local heating of stamp to corr… 458.45845845845849
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  • Local heating of stamp to correct overlay errors 9. Local heating of stamp to corr… 585.95261928595266
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  • Load application options 10. Load application options 586.78678678678682
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  • Shear thinning 11. Shear thinning 677.71104437771112
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  • Oscillatory load application 12. Oscillatory load application 720.32032032032032
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  • Oscillatory load application 13. Oscillatory load application 796.52986319652985
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  • Ultrasonic loading of stamp 14. Ultrasonic loading of stamp 925.89255922589257
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  • Shear-assisted imprint 15. Shear-assisted imprint 1014.5812479145812
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  • Addressing gas bubble entrapment defects 16. Addressing gas bubble entrapme… 1592.9596262929597
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  • Air bubble formation/dissolution 17. Air bubble formation/dissoluti… 1922.7227227227229
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  • Air bubble formation/dissolution 18. Air bubble formation/dissoluti… 2017.1504838171506
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  • State of the art today 19. State of the art today 2144.477811144478
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  • Relative importance of gas dissolution and droplet squeezing 20. Relative importance of gas dis… 2311.344678011345
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