ME 290R Lecture 4.2: Nanoimprint Lithography – Imprintable Materials II

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

View Presentation

Additional materials available (4)

Category

Online Presentations

Published on

Cite this work

Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 4.2: Nanoimprint Lithography – Imprintable Materials II," https://nanohub.org/resources/30306.

    BibTex | EndNote

Time

Tags

  1. lithography
  2. nano imprinting
  3. nanoimprint lithography
  4. nanomanufacturing
  5. nanoMFG Node
  6. processing
  7. thermoplastic resists
ME 290R Lecture 4.2: Nanoimprint Lithography – Imprintable Materials II
  • Lecture 4.2: Nanoimprint Lithography – Imprintable Materials II 1. Lecture 4.2: Nanoimprint Litho… 0
    00:00/00:00
  • shear thinning 2. shear thinning 7.4407741074407747
    00:00/00:00
  • Shear thinning 3. Shear thinning 114.18084751418085
    00:00/00:00
  • Apparent shear-thinning in 58 kDa polystyrene 4. Apparent shear-thinning in 58 … 211.34467801134468
    00:00/00:00
  • Modeling shear thinning with strain rate 5. Modeling shear thinning with s… 248.24824824824825
    00:00/00:00
  • Shear thinning modeling: in-plane shear stresses 6. Shear thinning modeling: in-pl… 424.82482482482482
    00:00/00:00
  • Some UV-curable acrylate materials 7. Some UV-curable acrylate mater… 765.83249916583247
    00:00/00:00
  • An example of a UV-curable resist: AMONIL 8. An example of a UV-curable res… 863.39673006339672
    00:00/00:00
  • UV curing resists: typical viscosities and surface tensions 9. UV curing resists: typical vis… 964.26426426426428
    00:00/00:00
  • Thermally and UV curing resists 10. Thermally and UV curing resist… 999.49949949949951
    00:00/00:00
  • Diffraction in NIL stamps 11. Diffraction in NIL stamps 1149.7831164497832
    00:00/00:00
  • What about molecular size effects? 12. What about molecular size effe… 1152.7527527527527
    00:00/00:00
  • What about molecular size effects? 13. What about molecular size effe… 1259.7931264597933
    00:00/00:00
  • Molding a carbon nanotube into polyurethane prepolymer 14. Molding a carbon nanotube into… 1444.678011344678
    00:00/00:00
  • Overcoming oxygen inhibition 15. Overcoming oxygen inhibition 1577.6443109776444
    00:00/00:00
  • Oxygen inhibition in step-and-repeat UV-NIL 16. Oxygen inhibition in step-and-… 1670.6373039706373
    00:00/00:00
  • Approaches to demolding 17. Approaches to demolding 1853.0196863530198
    00:00/00:00
  • Etch resistance and selectivity 18. Etch resistance and selectivit… 2473.8738738738739
    00:00/00:00
  • Selectivity: example 19. Selectivity: example 2524.9249249249251
    00:00/00:00
  • Direct Etch or Direct Imprint 20. Direct Etch or Direct Imprint 2645.5455455455458
    00:00/00:00
  • In-situ Multi-step Etch Scheme 21. In-situ Multi-step Etch Scheme 2791.0243576910243
    00:00/00:00
  • How to enhance etch resistance? 22. How to enhance etch resistance… 2904.6713380046713
    00:00/00:00
Pop Out