ME 290R Lecture 4.1: Nanoimprint Lithography – Imprintable Materials I

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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  • Taylor, Hayden (2019), "ME 290R Lecture 4.1: Nanoimprint Lithography – Imprintable Materials I," https://nanohub.org/resources/30301.

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  1. lithography
  2. nano imprinting
  3. nanoimprint lithography
  4. nanomanufacturing
  5. nanoMFG Node
  6. processing
  7. thermoplastic resists
ME 290R Lecture 4.1: Nanoimprint Lithography – Imprintable Materials I
  • Lecture 4.1: Nanoimprint Lithography – Imprintable Materials I 1. Lecture 4.1: Nanoimprint Litho… 0
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  • Key considerations in selecting a material for imprinting 2. Key considerations in selectin… 15.515515515515515
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  • Basic NIL resist options 3. Basic NIL resist options 229.2625959292626
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  • Thermoplastic NIL: material model for the resist 4. Thermoplastic NIL: material mo… 498.03136469803138
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  • NIL: material model for the resist 5. NIL: material model for the re… 704.47113780447114
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  • Thermoplastic resists 6. Thermoplastic resists 927.22722722722722
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  • Bulk rheological characterization of imprintable materials 7. Bulk rheological characterizat… 938.10477143810476
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  • Bulk rheological characterization of imprintable materials 8. Bulk rheological characterizat… 1248.048048048048
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  • Key relationships in thermoplatic resists 9. Key relationships in thermopla… 1275.7424090757424
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  • Using the NIL simulation technique to extract effective viscosities 10. Using the NIL simulation techn… 1337.3373373373374
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  • Nanoscale experiments 11. Nanoscale experiments 1650.7841174507842
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  • The Imprinting rate 12. The Imprinting rate 2084.0840840840842
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