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Titanium nitride (TiN) is an extremely hard ceramic material, often used as a coating on titanium alloys, steel, carbide, and aluminium components to improve the substrate's surface properties. See Wikipedia
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Chemical Equation for TDMAT ALD Formation of TiN?
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What is the chemical equation for the formation of Titanium Nitride in an ALD system using TDMAT?
https://nanohub.org/answers/question/1356