Process Lab: Defect-coupled diffusion

By Shuqing (Victor) Cao¹; Yang Liu¹; Peter Griffin¹

1. Stanford University

This tool simulates dopant diffusion coupled with point defects.

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Version 1.1 - published on 30 Oct 2019

doi:10.21981/4TB9-S464 cite this

This tool is closed source.

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Versions

Version	Released	DOI Handle	Published
1.1	30 Oct 2019	doi:10.21981/4TB9-S464	yes
1.0	22 Aug 2014	doi:10.4231/D3Q814T06	no
1	26 Sep 2006	doi:10.4231/D3XW47V8Z	no