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NanoCraft-FIBstream: Focused Ion Beam Stream File Generator
Generate a stream file for milling nanostructures (e.g. rectangular and circular nanohole arrays, v-groove slots ) by using focused ion beam (e.g. FEI Nova 200).
Citations Non-affiliated (1) | Affiliated (0)
Non-affiliated authors
- Victor Deinhart, Lisa-Marie Kern, Jan Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, Sviatoslav Kovalchuk, M.M. Schneider, Dieter Engel, Bastian Pfau, Bert Hecht, Kirill Bolotin, Stephanie Reich, Katja Hoflich, (2021), "The Patterning Toolbox FIB-o-mat: Exploiting The Full Potential Of Focused Helium Ions For Nanofabrication", Beilstein Journal Of Nanotechnology, Beilstein-Institut, 12, 1: pg: 304-318, (DOI: https://doi.org/10.3762/bjnano.12.25)