Ion Implantation, Thermal Oxidation and Atomic Layer Deposition

By Atilla Ozgur Cakmak1; Rich Hill2; NACK Network3

1. Center for Nanotechnology Education and Utilization, Pennsylvania State University University Park, PA 2. Erie Community College, Erie, NY 3. Nanotechnology Applications and Career Knowledge Network, Pennsylvania State University, State College, PA

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Researchers should cite this work as follows:

  • Atilla Ozgur Cakmak, Rich Hill, NACK Network (2022), "Ion Implantation, Thermal Oxidation and Atomic Layer Deposition," https://nanohub.org/resources/36542.

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