Photolithography (Option B)
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Abstract
This module presents an introduction and demonstration of a key step in photolithography, the process of patterning a substrate used in the manufacture of integrated circuit chips. Students replicate some of the steps in the process of photolithography, and learn how these processes fit into the fabrication of micro- and nanoscale devices such as integrated circuits. This activity uses water-based chemicals and processes, allowing it to be used with younger students and/or in classrooms and labs without a fume hood.
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Disponible en Español: Fotolitografía Opción B (a base de solvente).
Sponsored by
National Science Foundation
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Dakota County Technical College/ Nano-Link: Center for Nanotechnology Education