Equipment, Techniques, and Growth of Ultra-High Purity AlGaAs-GaAs Heterostructures by Molecular Beam Epitaxy

By Geoff Gardner

Birck Nanotechnology Center, Purdue University, West Lafayette, IN

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Abstract

Ultra-high purity aluminum gallium arsenide (AlGaAs)-gallium arsenide (GaAs) heterostructures grown by molecular beam epitaxy (MBE) that host a two-dimensional electron gas (2DEG) are a rich environment for the study of fundamental condensed matter physics and may have applications for quantum computing. I will detail research and investigation into critical equipment and materials engineering issues related to the quality of the fabricated 2DEG systems. I also will present data that demonstrates the critical role gallium purity plays in 2DEG mobility.

Bio

Geoff Gardner Geoff Gardner received his B.S. and M.S. degrees from Purdue University in Physics with a minor in Electrical and Computer Engineering.  He has held various engineering positions at the Purdue Applied Physics Laboratory and Birck Nanotechnology Center over the past 12 years and currently is a Senior Research Associate for Station Q Purdue.  He has been working closely with Professor Michael Manfra, the Bill and Dee O'Brien Chair Professor of Physics and Astronomy and director of Station Q Purdue, since 2010.

Cite this work

Researchers should cite this work as follows:

  • Geoff Gardner (2017), "Equipment, Techniques, and Growth of Ultra-High Purity AlGaAs-GaAs Heterostructures by Molecular Beam Epitaxy," https://nanohub.org/resources/26615.

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Time

Location

Room 1001, Birck Nanotechnology Center, Purdue University, West Lafayette, IN

Tags

Equipment, Techniques, and Growth of Ultra-High Purity AlGaAs-GaAs Heterostructures by Molecular Beam Epitaxy
  • Equipment, Techniques, and Growth of Ultra-High Purity AlGaAs-GaAs Heterostructures by Molecular Beam Epitaxy 1. Equipment, Techniques, and Gro… 0
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  • Outline 2. Outline 23.123123123123126
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  • Applications for GaAs 2DEGs 3. Applications for GaAs 2DEGs 43.20987654320988
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  • Applications for UHP GaAs 4. Applications for UHP GaAs 89.456122789456131
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  • Single Crystal Gallium Arsenide 5. Single Crystal Gallium Arsenid… 135.669002335669
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  • Single Crystal Aluminum Gallium Arsenide 6. Single Crystal Aluminum Galliu… 236.5699032365699
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  • Molecular Beam Epitaxy Overview 7. Molecular Beam Epitaxy Overvie… 321.35468802135472
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  • Assembling an MBE 8. Assembling an MBE 404.47113780447114
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  • Image of MBE 9. Image of MBE 433.63363363363362
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  • Image of MBE 10. Image of MBE 441.57490824157492
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  • System Highlights 11. System Highlights 514.9149149149149
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  • Importance of Vacuum Quality 12. Importance of Vacuum Quality 618.918918918919
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  • Liquid Nitrogen Delivery 13. Liquid Nitrogen Delivery 851.951951951952
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  • Evaluation of the vacuum 14. Evaluation of the vacuum 907.97464130797471
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  • RGA Spectra 15. RGA Spectra 956.18952285618957
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  • Preparing a chamber for UHP 16. Preparing a chamber for UHP 1003.636970303637
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  • RGA Spectra 17. RGA Spectra 1082.2822822822823
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  • III-V Source Cells 18. III-V Source Cells 1132.1988655321989
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  • Custom doping sources 19. Custom doping sources 1242.1421421421421
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  • Rheed Measurements 20. Rheed Measurements 1386.4197530864199
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  • Rheed to Observe Surface Phase 21. Rheed to Observe Surface Phase 1462.5291958625292
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  • Quick Review 22. Quick Review 1548.6152819486154
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  • Growth of a Sample 23. Growth of a Sample 1568.5352018685353
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  • The 2 Dimensional Electron Gas 24. The 2 Dimensional Electron Gas 1636.8368368368369
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  • Types of disorder (scattering events) 25. Types of disorder (scattering … 1721.7550884217551
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  • Doping well heterostructure 26. Doping well heterostructure 1895.1951951951953
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  • Quick Review 27. Quick Review 2000
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  • Results of our first campaign 28. Results of our first campaign 2020.6539873206541
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  • Intentional Alloy Disorder 29. Intentional Alloy Disorder 2168.5352018685353
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  • Novel FET device 30. Novel FET device 2284.9516182849516
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  • Return to mobility evolution plot 31. Return to mobility evolution p… 2371.2712712712714
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  • Modifications to MBE 32. Modifications to MBE 2391.9586252919589
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  • Source material and handling 33. Source material and handling 2449.0824157490824
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  • Glovebox and mobile UHV chamber 34. Glovebox and mobile UHV chambe… 2521.0543877210544
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  • Glove Box Operations 35. Glove Box Operations 2580.9476142809476
    00:00/00:00
  • Glove box results 36. Glove box results 2592.359025692359
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  • An experiment! 37. An experiment! 2633.6002669336003
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  • Outgassing is a thermal treatment 38. Outgassing is a thermal treatm… 2651.8184851518185
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  • What conclusions can be drawn? 39. What conclusions can be drawn? 2722.3556890223558
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  • Discussion on Possible Ga contaminates 40. Discussion on Possible Ga cont… 2771.9719719719719
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  • A path to cleaner Gallium 41. A path to cleaner Gallium 2860.9943276609943
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  • Proposal for new source cell 42. Proposal for new source cell 2944.0106773440107
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  • Conclusion 43. Conclusion 3002.7027027027029
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  • Acknowledgments 44. Acknowledgments 3051.8184851518185
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  • Proposal for new source cell 45. Proposal for new source cell 3106.3396730063396
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