History of SiC Power Devices and a Vision for the Future

By Anant Kumar Agarwal

Wide Band Gap Consultancy

Published on

Abstract

Wide Band Gap (WBG) semiconductor devices have undergone substantial development activities over the last 25 years. These efforts have benefited from significant infusions of government funding (~$1 B). As a result, select devices have been commercialized and WBG semiconductors are now poised for tremendous market growth over the next 25 years. It is anticipated that WBG semiconductors will replace silicon in applications with ratings from 400 V to 15 kV while enabling the creation of new opportunities with devices up to 40 kV. Commercialization of these high voltage devices has the potential to revolutionize future power systems with the wide-scale integration of renewable energy in the grid.

We will discuss technical issues that have been solved to date and new problems that will need to be addressed to enable the further adoption of WBG devices. Specifically, we will focus on the technical challenges associated with the development of 10-40 kV SiC Insulated Gate Bipolar Transistors (IGBTs).

Additionally, the role of students and universities in the expansion of WBG technologies, funding mechanisms and opportunities, collaborations with industrial partnerships and leveraging university cleanroom facilities will be covered. In this context, we will briefly discuss the four programs which I helped create and manage at US Department of Energy: (1) PowerAmerica ($70 M), (2) Next Generation of Electric Machines (I and II ~ $50 M) and Graduate Traineeships in Power Electronics ($6 M). The courses I plan to teach will focus on both fundamental and practical aspects of WBG technology to prepare students for this revolution, in the skills they will need to acquire to be successful in industry.

Bio

Anant Agarwal Dr. Agarwal joined the US Department of Energy (DOE) in March 2013, retiring in November 2016. While at DOE, Dr. Agarwal helped create and manage four programs related to wide band- gap technology and their applications including PowerAmerica, Next Generation of Electric Machines (I and II) and Graduate Traineeships. From 1999 to 2013, Dr. Agarwal was Director of Research and Development for Wide Band Gap (WBG) devices at Cree, Inc. In this role, he oversaw the development and commercialization of Silicon Carbide diode and MOSFET power devices. Today, these WBG semiconductors are being employed globally to improve efficiency and reduce power consumption in systems such as power supplies, solar inverters, and motor drives. Previously, Dr. Agarwal was a Fellow at Northrop Grumman Science and Technology Center, Pittsburgh (1990-1999). While at Northrop Grumman he led research activities on radio frequency Silicon and Silicon-Germanium transistors. He was also instrumental in solving a large number of fundamental issues relating to WBG technologies.

Prior to joining Northrop Grumman, Dr. Agarwal held various teaching and research positions (1984-1990) including Associate Professor in Allahabad, India and Member of the Technical Staff at AT&T Bell Laboratories, Murray Hill, NJ. While at Bell Labs he was involved in the development of Gallium-Arsenide digital circuits for fiber-optic communications. Dr. Agarwal received his PhD degree in Electrical Engineering from Lehigh University, Pa in 1984; Masters degree in Electrical Engineering from University of Tennessee Space Institute (UTSI) in 1980; and Bachelor of Science in Electrical Engineering from MNR Engineering College, University of Allahabad, India in 1978. He jointly holds more than 60 patents, has co-authored more than 300 research papers, co-edited a book on Silicon Carbide Technology, co-authored five book chapters and was elected an IEEE Fellow in January 2012 for his life time contributions to Wide Band Gap technologies. As a leading research scientist in this area, Dr. Agarwal’s life goal has been to successfully commercialize WBG power devices to resurrect the domestic power electronics industry while educating the next generation of researchers. This will ultimately enable the creation of high quality manufacturing jobs in the US while perpetuating a high-tech US workforce.

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Researchers should cite this work as follows:

  • Anant Kumar Agarwal (2017), "History of SiC Power Devices and a Vision for the Future," https://nanohub.org/resources/26327.

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EE 317, Purdue University, West Lafayette, IN

History of SiC Power Devices and a Vision for the Future
  • History of SiC Power Devices and a Vision for the Future 1. History of SiC Power Devices a… 0
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  • Outline 2. Outline 16.182849516182849
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  • Why Wide Band Gap Semiconductors for Power Switching 3. Why Wide Band Gap Semiconducto… 44.110777444110781
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  • Basic Material Properties 4. Basic Material Properties 46.813480146813482
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  • Reverse Bias 5. Reverse Bias 68.001334668001334
    00:00/00:00
  • Si overcomes the high resistance issue with PiN Diode 6. Si overcomes the high resistan… 372.47247247247248
    00:00/00:00
  • Diode Turn-Off Transient 7. Diode Turn-Off Transient 427.59426092759429
    00:00/00:00
  • MOSFET 8. MOSFET 473.57357357357358
    00:00/00:00
  • 1 kV Si IGBT 9. 1 kV Si IGBT 633.36670003336667
    00:00/00:00
  • Si PiN diode 10. Si PiN diode 639.77310643977319
    00:00/00:00
  • Silicon PiN can be replaced by SiC SBD 11. Silicon PiN can be replaced by… 910.0767434100768
    00:00/00:00
  • SiC IGBT for 10 – 40 kV Applications 12. SiC IGBT for 10 – 40 kV Appl… 951.35135135135135
    00:00/00:00
  • n-Channel IGBT 13. n-Channel IGBT 955.62228895562237
    00:00/00:00
  • Analytical Solution of Ambipolar Diffusion Equation 14. Analytical Solution of Ambipol… 1183.8505171838506
    00:00/00:00
  • On-State Voltage Drop Increases with Reducing Lifetime 15. On-State Voltage Drop Increase… 1339.4394394394394
    00:00/00:00
  • Turn-Off Transient under Inductive Load 16. Turn-Off Transient under Induc… 1377.4441107774442
    00:00/00:00
  • Switching Transients become faster with Reducing Lifetime 17. Switching Transients become fa… 1573.4401067734402
    00:00/00:00
  • Maximum Operating frequency for 20 kV n-Channel SiC IGBT 18. Maximum Operating frequency fo… 1607.5742409075742
    00:00/00:00
  • Control of carrier lifetime of thick n-type 4H-SiC epilayers 19. Control of carrier lifetime of… 1698.8321654988322
    00:00/00:00
  • We developed the First 12 kV p-IGBT in 2008 20. We developed the First 12 kV p… 1981.8485151818486
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  • The Last 25 Years 21. The Last 25 Years 2198.7320653987322
    00:00/00:00
  • MICROXTM-An All-Silicon Technology for Monolithic Microwave Integrated Circuits 22. MICROXTM-An All-Silicon Techno… 2228.3283283283286
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  • 1.1 kV 4H-SiC Power UMOSFET's 23. 1.1 kV 4H-SiC Power UMOSFET's 2283.35001668335
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  • Design of the Power Device 24. Design of the Power Device 2341.9753086419755
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  • SiC MOSFET 25. SiC MOSFET 2468.5352018685353
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  • Untitled: Slide 26 26. Untitled: Slide 26 2478.0780780780783
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  • Hall mobility and free electron density at the SiC/SiO2 interface in 4H–SiC 27. Hall mobility and free electro… 2572.9396062729397
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  • Some Critical Materials and Processing Issues in SiC Power Devices 28. Some Critical Materials and Pr… 2623.7904571237905
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  • A 2-3 nm of Ba interlayer between SiC and SiO2 29. A 2-3 nm of Ba interlayer betw… 2743.0096763430097
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  • 10 A, 2.4 kV Power DiMOSFETs in 4H-SiC 30. 10 A, 2.4 kV Power DiMOSFETs i… 2818.6186186186187
    00:00/00:00
  • Large Area, 1600 V / 150 A, 4H-SiC DMOSFET 31. Large Area, 1600 V / 150 A, 4H… 3002.6026026026029
    00:00/00:00
  • Some Products my R&D Team Helped Develop at Cree 32. Some Products my R&D Team Help… 3027.6276276276276
    00:00/00:00
  • My R&D team at Cree created products that are highly reliable and robust 33. My R&D team at Cree created pr… 3104.3376710043376
    00:00/00:00
  • A lot can be learned from the spec-sheet for 1200 V, 25 mohm product 34. A lot can be learned from the … 3107.7744411077747
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  • Ion-Implanted Emitter in BJTs does not work! 35. Ion-Implanted Emitter in BJTs … 3116.24958291625
    00:00/00:00
  • SiC BJTs have been successfully fabricated 36. SiC BJTs have been successfull… 3162.9963296629962
    00:00/00:00
  • 700-V Asymmetrical 4H-SiC Gate Turn-Off Thyristors (GTO's) 37. 700-V Asymmetrical 4H-SiC Gate… 3181.1811811811813
    00:00/00:00
  • SiC Thyrsitors and GTOs have come a long way 38. SiC Thyrsitors and GTOs have c… 3209.8431765098435
    00:00/00:00