High Accuracy Atomic Force Microscope with Self-Optimizing Scan Control
High Accuracy Atomic Force Microscope with Self-Optimizing Scan Control
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1. High Accuracy Atomic Force Mic…
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2. Outline
23.323323323323326
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3. Over 30-Year History in AFM/SP…
61.361361361361361
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4. History of AFM Industry
92.559225892559226
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5. Park Systems Today
160.19352686019354
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6. Park Systems Global Sales & Se…
172.87287287287288
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7. Park Systems, now a Public Com…
184.2842842842843
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8. Park AFM Product Line
204.4044044044044
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9. Over 1,000 Customers Worldwide
285.51885218551888
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10. Imec and Park Systems Signed J…
295.4954954954955
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11. AFM Technology Innovation
343.27660994327664
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12. Principle of AFM
363.66366366366367
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13. Tube Scanner Artifact
403.06973640306973
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14. Tip Wearing
519.88655321988654
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15. Ideal AFM
558.12479145812483
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16. New AFM Design Scan Accuracy
582.81614948281617
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17. Basic Concept
590.15682349015685
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18. Flexure Guided X-Y Scanner
634.40106773440107
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19. Flexure Guided X-Y Scanner
669.86986986987
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20. Two Pairs of Detectors for XY …
711.94527861194535
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21. Servo Results: Scan Linearity
729.69636302969639
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22. 100µm Profiling by Flexure Sc…
753.82048715382052
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23. Surface Roughness and Waviness
830.13013013013017
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24. Non-Contact Mode Minimizing Ti…
911.94527861194535
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25. Tip-Sample Interaction
921.654988321655
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26. A-d Curves Have All the Inform…
961.92859526192865
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27. Bypassing the Difficulties: Us…
1030.663997330664
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28. Key to Enabling True Non-Conta…
1075.3086419753088
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29. Improved Z Scanner Bandwidth
1124.7247247247249
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30. Improved Z Scan Straightness
1152.0520520520522
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31. Improved Z Detector Noise Leve…
1165.6990323656992
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32. Non-Contact AFM Proof 1: MgO S…
1248.9823156489824
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33. Non-Contact AFM Proof 2: CrN S…
1274.8415081748415
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34. Non-Contact AFM Proof 3: Deep …
1335.9025692359026
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35. Photonic Band Gap
1372.339005672339
00:00/00:00
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36. Diatom
1427.2605939272607
00:00/00:00
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37. SmartScanTM Automated Scan Opt…
1445.3453453453453
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38. Revolutionary AFM User Experie…
1476.5765765765766
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39. New Powerful Features of Smart…
1498.7320653987322
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40. Optimizing Scan Parameters
1509.3426760093428
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41. Feedback Loop for Z-Servo
1574.0073406740073
00:00/00:00
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42. Classical Control Theory
1589.1224557891226
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43. Ideal Z Feedback Response
1611.1444778111445
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44. Transfer Functions & Pole-Zero…
1631.7650984317652
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45. Pole-Zero Matching Results
1761.3279946613282
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46. What About Scan Speed?
1806.6066066066067
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47. Adaptive Scan using Previous L…
1840.573907240574
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48. Adaptive Scan Rate Calculation
1850.2836169502837
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49. Adaptive Scan vs. Fixed Rate S…
1878.2115448782117
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50. Quality of Images Experienced …
1902.0687354020688
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51. Time for High Quality Image
2034.0340340340342
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52. High Speed Scans Time Constant…
2049.1825158491824
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53. Basic Consideration for High S…
2114.5145145145148
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54. Sensor Response: F
2134.034034034034
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55. UV Photoresist; High Speed Sca…
2170.6039372706041
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56. Al Projection Pattern; High Sp…
2234.5345345345345
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57. Pentacene; High Speed Scan
2280.1134467801135
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58. Industrial Applications
2295.2952952952955
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59. AFM as Production Tool
2359.4928261594928
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60. Automated AFM for Inline Measu…
2397.697697697698
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61. Step Height Measurement Repeat…
2430.8641975308642
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62. Critical Angle Measurement
2450.0834167500834
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63. Ultra Flat Si Wafers
2481.0477143810476
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64. Micro Lens Analysis
2494.8615281948614
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65. Environmental Chamber for NX10
2526.5265265265266
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66. NX-Hivac
2570.1701701701704
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67. Summary
2614.4477811144479
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68.
2645.7457457457458
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