Toward Improving the Precision of Nanoscale Force-Displacement Measurements
Toward Improving the Precision of Nanoscale Force-Displacement Measurements
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1. Toward Improving the Precision…
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2. Overview of the presentation
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3. Nanotechnology has great poten…
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4. Technological bottleneck. Larg…
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5. Engineering of micro/nanoscale…
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6. Measuring forces. Tangible phe…
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7. Atomic Force Microscope (AFM):…
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8. Components of an AFM.
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9. Common methods to calibrate AF…
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10. AFM calibration: The thermal m…
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11. Overview of the presentation
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12. Predicted performance vs. True…
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13. Dw affects width, gap, length;…
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14. Resonator stiffness kx
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15. Stiffness is a function of sev…
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16. Relative error in stiffness du…
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17. Relative error in mass due to …
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18. Relative error in resonance du…
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19. Measurements of Young's modulu…
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20. Relative error in stiffness du…
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21. Overview of the presentation
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22. EMM: Geometric, dynamic, and m…
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23. Electro Micro Metrology (EMM) …
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24. A simple EMM structure (not un…
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25. Layout versus fabrication
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26. Close-up of a fabricated comb …
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27. Radius of compliance. The anch…
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28. Reducing the effects of filet …
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29. Width by SEM, severed cross se…
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30. Fabrication vs. effective prop…
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31. Identical comb voltages identi…
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32. Static equilibrium by Hooke's …
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33. Deflections are not identical
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34. And changes in capacitances ar…
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35. Forces due to changes in capac…
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36. Comb drives have fringing fiel…
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37. Partial differential ratios = …
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38. What we get from mechanics
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39. What we get from electrostatic…
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40. Coupling mechanics with electr…
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41. The difference between layout …
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42. Planar geometries become avail…
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43. What about parasitic capacitan…
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44. What about uncertainty in capa…
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45. Sensitivity analysis
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46. Expectations for geometric ext…
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47. Expectations for geometric pre…
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48. Expectations for geometric pre…
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49. Measuring comb drive force
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50. Measuring comb drive force
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51. Sensitivity analysis: F versus…
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52. Sensitivity analysis: F versus…
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53. Expectations for force precisi…
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54. Force: scaling of phenomena
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55. Position sensing / manipulatio…
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56. Application 1: Calibration / B…
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57. Application 2: Calibration / T…
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58. Application 3: AFM-on-a-chip
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59. Summary
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