New Directions in MEMS for Wireless Harsh-Environment Sensors

By Dimitrios Peroulis

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Researchers should cite this work as follows:

  • Dimitrios Peroulis (2013), "New Directions in MEMS for Wireless Harsh-Environment Sensors," https://nanohub.org/resources/19100.

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Burton Morgan 129, Purdue University, West Lafayette, IN

New Directions in MEMS for Wireless Harsh-Environment Sensors
  • New Directions in MEMS for Wireless Harsh-Environment Sensors 1. New Directions in MEMS for Wir… 0
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  • MEMS The World! 2. MEMS The World! 67.667667667667672
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  • MEMS Sensors in Consumer Electronics 3. MEMS Sensors in Consumer Elect… 149.04904904904905
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  • MEMS Sensors in Consumer Electronics 4. MEMS Sensors in Consumer Elect… 181.01434768101436
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  • Harsh Environment Challenges 5. Harsh Environment Challenges 252.71938605271939
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  • Ex. 1: High-g MEMS Accelerometers 6. Ex. 1: High-g MEMS Acceleromet… 473.77377377377377
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  • Ex. 1: High-g MEMS Accelerometers 7. Ex. 1: High-g MEMS Acceleromet… 561.39472806139474
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  • Ex. 1: High-g MEMS Accelerometers 8. Ex. 1: High-g MEMS Acceleromet… 605.67233900567237
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  • Ex. 1: High-g MEMS Accelerometers 9. Ex. 1: High-g MEMS Acceleromet… 681.74841508174848
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  • Ex. 1: High-g MEMS Accelerometers 10. Ex. 1: High-g MEMS Acceleromet… 736.67000333667
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  • Ex. 1: High-g MEMS Accelerometers 11. Ex. 1: High-g MEMS Acceleromet… 864.63129796463136
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  • Ex. 1: High-g MEMS Accelerometers 12. Ex. 1: High-g MEMS Acceleromet… 978.41174507841174
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  • Ex. 1: High-g MEMS Accelerometers 13. Ex. 1: High-g MEMS Acceleromet… 1043.20987654321
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  • Ex. 1: High-g MEMS Accelerometers 14. Ex. 1: High-g MEMS Acceleromet… 1160.2936269602938
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  • Ex. 1: High-g MEMS Accelerometers 15. Ex. 1: High-g MEMS Acceleromet… 1216.64998331665
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  • E.g. 2: Condition Monitoring 16. E.g. 2: Condition Monitoring 1311.1444778111445
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  • Let's Pick One Application… 17. Let's Pick One Application… 1501.1678345011678
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  • Why and How to Change Current Practice 18. Why and How to Change Current … 1651.2178845512181
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  • How to Monitor Bearings 19. How to Monitor Bearings 1699.2659325992661
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  • Existing Technologies Review 20. Existing Technologies Review 1731.031031031031
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  • Passive Low-Frequency RFID Sensor 21. Passive Low-Frequency RFID Sen… 1803.4701368034703
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  • MEMS High-Temp Sensors Concept 22. MEMS High-Temp Sensors Concept 1958.7253920587255
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  • Large Arrays, > 99% Yield 23. Large Arrays, > 99% Yield 2082.7160493827159
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  • Implemented MEMS High-Temp Sensors 24. Implemented MEMS High-Temp Sen… 2110.343677010344
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  • Hermetically-Sealed MEMS Sensors 25. Hermetically-Sealed MEMS Senso… 2134.6012679346013
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  • MEMS Sensor Assembly on Bearing 26. MEMS Sensor Assembly on Bearin… 2185.3853853853857
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  • Bearing Telemeter System 27. Bearing Telemeter System 2212.0453787120455
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  • Data Acquisition and Calibration Software 28. Data Acquisition and Calibrati… 2230.5638972305642
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  • MEMS Sensor Measurements 29. MEMS Sensor Measurements 2247.9479479479483
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  • MEMS Sensor Measurements 30. MEMS Sensor Measurements 2301.101101101101
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  • MEMS Sensors: Cycling 31. MEMS Sensors: Cycling 2328.6286286286286
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  • MEMS Sensors: Cycling 32. MEMS Sensors: Cycling 2436.1361361361364
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  • MEMS Sensors: Cycling 33. MEMS Sensors: Cycling 2450.5839172505839
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  • MEMS Sensors: Constant Bias 34. MEMS Sensors: Constant Bias 2459.2926259592928
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  • MEMS Sensors: Constant Bias 35. MEMS Sensors: Constant Bias 2485.1184517851184
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  • MEMS Sensors: Bearing Measurements 36. MEMS Sensors: Bearing Measurem… 2500.7340674007341
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  • Bearing Failure Detection 37. Bearing Failure Detection 2587.2872872872872
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  • Summary 38. Summary 2685.1184517851184
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  • Thank you! 39. Thank you! 2791.4914914914916
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