High Accuracy Atomic Force Microscope with Self-Optimizing Scan Control
Online Presentations | 19 Sep 2016 | Contributor(s): Ryan (Young-kook) Yoo
Atomic force microscope (AFM) is a very useful instrument in characterizing nanoscale features, However, the original AFM design, based on piezo-tube scanner, had slow response and non-orthogonal behavior, inadequate to address the metrology needs of industrial applications: accuracy,...
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