aTCAD Lab
Semiconductor Process Model
Semiconductor process modeling is a vast field in which several commercial products are available and in use for production in industry and to some extent in education. nanoHUB is serving a few applications that are primarily geared towards education. The four tools entitled ‘Process Lab …’Oxidation, Oxidation Flux, Concentration Dependent Diffusion, and Point Defect Coupled Diffusion are all educational front-ends to the general Prophet tool in aTCADlab.
Process Lab – Oxidation
The Oxidation Lab in aTCADlab simulates the oxidation process in integrated circuit fabrication. It is supported by a supplemental document that describes the theory and potential experiments that can be conducted.
Process Lab – Oxidation Flux
The Process Oxidation Flux Lab in aTCADlab simulates the oxidation flux in the oxide growth process in integrated circuit fabrication. It is supported by a supplemental document that describes the theory and potential experiments that can be conducted.
Process Lab – Concentration Dependent Diffusion
The Concentration Dependent Diffusion Lab in aTCADlab simulates the oxidation flux in the oxide growth process in integrated circuit fabrication.
Process Lab – Point Defect Coupled Diffusion
The Point Defect Coupled Diffusion Lab in aTCADlab the point-defect-coupled diffusion process in integrated circuit fabrication.
PROPHET
PROPHET in aTCADlab was originally developed for semiconductor process simulation. Device simulation capabilities are currently under development. PROPHET solves sets of partial differential equations in one, two, or three spatial dimensions. All model coefficients and material parameters are contained in a database library which can be modified or added to by the user. Even the equations to be solved can be specified by the end user. It is supported by an extensive set of User Guide pages and a seminar on Nano-Scale Device Simulations Using PROPHET.