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Sharif M Salahuddin

How to do 3D quantum monte carlo in Silvaco Atlas

I am trying to simulation LER, RDF, variation of Fin height and fin thickness of tri-gate FINFET. I have access to Silvaco atlas. Do anybody has experience on 3D monter carlo in Silvac Atlas. I need help.

  1. 3D process variation
  2. 3D TCAD
  3. Monte Carlo

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