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Ganga Sepali Jayarathna

Can I use this version to simulate a two-stage implantation process with multiple dopants, energy levels, and tilt angles?
  1. ion implantation
  2. tool:silvacotcad

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    Eric Guichard

    yes

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      Ganga Sepali Jayarathna

      Thank you, where can I find more information on how to use this specific version of Silvaco TCAD?

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