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ECE 695Q Lecture 12: Optical Lithography – Contrast and Resolution in Microscopy and Lithography Systems
Online Presentations | 06 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 08: Optical Lithography – Alignment
Online Presentations | 06 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 05: Resist Technology
Online Presentations | 06 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 06: Optical Lithography - Optical Imaging System
Online Presentations | 03 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 09: Optical Lithography - Position Detection
Online Presentations | 03 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 11: Optical Lithography – Resolution Enhancement Techniques II
Online Presentations | 03 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 03: Lithography Used In Semiconductor Manufacturing
Online Presentations | 01 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 04: Contamination Control and Substrate Cleaning
Online Presentations | 01 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 07: Optical Lithography – Lithography System
Online Presentations | 01 Jun 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 01: Introduction
Online Presentations | 12 May 2016 | Contributor(s):: Minghao Qi
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ECE 695Q Lecture 02: Overview of Lithography
Online Presentations | 12 May 2016 | Contributor(s):: Minghao Qi
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Small Scale Stenciling: Mask Lab
Teaching Materials | 05 Apr 2016 | Contributor(s):: Marilyn Garza, NNCI Nano
This lab is analogous with some nanofabrication processes. This lab will help students understand some of the challenges encountered while making semiconductor chips and waveguides, both of which are found in electronic circuits. The content is appropriate for students in middle school or...
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Vistec VB6 EBL Dose Pattern Generator
Tools | 08 Dec 2015 | Contributor(s):: Sajid M Choudhury
This tool generates a pattern for the Vistec VB6 EBL. This tool makes it easier to generate text for the serpentine pattern of VB6 dose.
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Luis César Aliaga
https://nanohub.org/members/103848
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[Illinois] Graphene Synthesis from Biochar using Wet Chemical Treatment Process
Online Presentations | 27 Sep 2013 | Contributor(s):: Sriraam Chandrasekaran
Biochar is a major by-product from pyrolysis and gasification of biomass. Biochar finds potential applications in soil amendment, carbon sequestration, super capacitors, adsorbents, etc. However, its applicability is limited by its properties such as low carbon content, low porosity, and surface...
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BME 695L Lecture 15: GMP and Issues of Quality Control Manufacture of Nanodelivery Systems
Online Presentations | 10 Nov 2011 | Contributor(s):: James Leary
See references below for related reading.15.1 Overview15.1.1 What does cGMP mean?15.1.2 Why GMP? Controlling processes means more predictable...
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Process Modeling
Series | 23 Aug 2011 | Contributor(s):: Dragica Vasileska
This series on process modeling describes key process modeling steps such as implantation, diffusion, oxidation, etching, deposition, etc.
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Silvaco Athena - Part 1
Teaching Materials | 03 Aug 2011 | Contributor(s):: Dragica Vasileska
This is part of a series of lectures on process modeling. In this lecture some introductory concepts are described followed by a description of the ion implantation process.
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Silvaco Athena - Part 2
Teaching Materials | 04 Aug 2011 | Contributor(s):: Dragica Vasileska
This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.
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Device Parameters Extraction Within Silvaco Simulation Software
Teaching Materials | 29 Jul 2011 | Contributor(s):: Dragica Vasileska
This set of slides explains the extract statements within SILVACO simulation software.