This set of powerpoint slides describes the diffusion and the oxidation process. Also briefly described are etching and epitaxy process.

Researchers should cite this work as follows:

• Dragica Vasileska (2011), "Silvaco Athena - Part 2," https://nanohub.org/resources/11816.

  BibTex | EndNote

1. diffusion
2. Epitaxial Growth
3. epitaxy
4. etching
5. nanoelectronics
6. oxidation
7. oxides
8. processing
9. process modeling
10. Silvaco