Tags: NEMS/MEMS

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Description

The term Nanoelectromechanical systems or NEMS is used to describe devices integrating electrical and mechanical functionality on the nanoscale. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.

Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology.

MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors

Learn more about NEMS/MEMS from the many resources on this site, listed below. More information on NEMS/MEMS can be found here.

Teaching Materials (41-60 of 69)

  1. Learning Module: Introduction to Sensors - Instructor Guides

    Teaching Materials | 17 May 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS).  This module covers "sensors" - what they are, how they work, and how they are used in both macro and micro-sized systems.  An activity...

  2. Learning Module: Introduction to Actuators

    Teaching Materials | 17 May 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS).  This module covers "actuators" - what they are, how they work, and how they are used in both macro and micro-sized systems.  An activity...

  3. Learning Module: Introduction to Actuators - Instructor Guides

    Teaching Materials | 17 May 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS).  This module covers "actuators" - what they are, how they work, and how they are used in both macro and micro-sized systems.  An activity...

  4. Learning Module: History of MEMS - Instructor Guides

    Teaching Materials | 10 May 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module provides a timeline of the progression of microtechnology through a series of innovations that starts with the first Point Contact Transistor built in 1947 and ends with the optical network switch in 1999.  Activities provide the opportunity to build on this timeline and...

  5. Learning Module: History of MEMS

    Teaching Materials | 10 May 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module provides a timeline of the progression of microtechnology through a series of innovations that starts with the first Point Contact Transistor built in 1947 and ends with the optical network switch in 1999.  Activities provide the opportunity to build on this timeline and...

  6. Learning Module: Crystallography Overview for MEMS - Instructor Guides

    Teaching Materials | 27 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module introduces the science of crystallography and its importance to microtechnology and the fabrication of microelectromechanical systems (MEMS).  Four activities are provided that allow students to further explore several concepts of this science and "see" the...

  7. Learning Module: Crystallography Overview for MEMS

    Teaching Materials | 27 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module introduces the science of crystallography and its importance to microtechnology and the fabrication of microelectromechanical systems (MEMS).  Four activities are provided that allow you to further explore several concepts of this science and "see" the...

  8. Learning Module: Photolithography Overview for MEMS - Instructor Guides

    Teaching Materials | 26 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning modules provides an overview of the most common photolithography process used in the fabrication of microelectromechnical systems (MEMS), its terminology and basic concepts.  Activities allows students to further explore some of these concepts.

  9. Learning Module: Photolithography Overview for MEMS

    Teaching Materials | 26 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts.  Activities allow you to further explore some of these concepts.

  10. Learning Module: Deposition Processes Overview for Microsystems - Instructor Guides

    Teaching Materials | 26 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module is an introduction to the common processes used to deposit thin films for the fabrication of micro-size devices.  Thermal oxidation and several types of deposition are discussed.  Activities provide further exploration into these processes as well as the properties...

  11. Learning Module: Etch Processes Overview for Microsystems - Instructor Guides

    Teaching Materials | 25 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module introduces the most common etch processes used for the fabrication of microsystems.  Activities allow students to demonstrate their understanding of the terminology and basic concepts of these processes.

  12. Learning Module: Etch Processes Overview for Microsystems

    Teaching Materials | 25 Apr 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module introduces the most common etch processes used for the fabrication of microsystems.  Activities allow you to demonstrate your understanding of the terminology and basic concepts of these processes.

  13. Learning Module: Hazardous Materials I and II - Instructor Guides

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module provides information on hazardous materials and how these materials could affect one's health and the safety of the working environment.  This information should provide students and employees with the knowledge and confidence needed to work in environments in which...

  14. Learning Module: Hazardous Materials I and II

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning module provides information on hazardous materials and how these materials could affect one's health and the safety of the working environment.  This information should provide students and employees with the knowledge and confidence needed to work in environments in which...

  15. Learning Module: Safety Data Sheets (SDS) - Instructor Guides

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    A Safety Data Sheet (SDS) contains valuable information and OSHA required information on a chemical - its physical and chemical properties, potential hazards, proper methods for storing and transporting, and much more.  This learning module provides information on the requirements and...

  16. Learning Module: Safety Data Sheets (SDS)

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    A Safety Data Sheet (SDS) contains valuable information and OSHA required information on a chemical - its physical and chemical properties, potential hazards, proper methods for storing and transporting, and much more.  This learning module provides information on the requirements and...

  17. Learning Module: Chemical Lab Safety Rules - Instructor Guides

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous.  This learning module provides the general safety rules for working in facilities and laboratories that use chemicals.  Through its activities, the learning module gives...

  18. Learning Module: Interpreting Chemical Labels - Instructor Guide

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous.  OSHA requires specific information about a chemical to be on its label. This learning module provides information needed to interpret chemical labels and symbols used. ...

  19. Learning Module: Interpreting Chemical Labels

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    The fabrication of micro and nano devices requires the use of several types of chemicals, both inert and hazardous.  OSHA requires specific information about a chemical to be on its label. This learning module provides information needed to interpret chemical labels and symbols used. ...

  20. Learning Module: Personal Protective Equipment (PPE) - Instructor Guides

    Teaching Materials | 27 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)

    This learning modules introduces students to the types of personal protective equipment (PPE) required when working in a manufacturing or laboratory environment.  The purpose of PPE is discussed as well as the type of PPE required for different tasks.