Learning Module: Crystallography Overview for MEMS

By Southwest Center for Microsystems Education (SCME)

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

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Abstract

This learning module introduces the science of crystallography and its importance to microtechnology and the fabrication of microelectromechanical systems (MEMS).  Four activities are provided that allow you to further explore several concepts of this science and "see" the formation of crystals and crystal planes. 

This learning module includes the following.

  • Pre-test (Knowledge Probe)
  • Reading:  Crystallography Overview for MEMS
  • Presentation:  Crystallography Overview for MEMS (pdf)
  • Activity:  The Miller index
  • Activity: Growing Crystals - Hot Ice
  • Activity: Breaking Wafers
  • Activity:  An Origami Crystal
  • Final Assessment

Instructor materials for this learning module are available here.

 

Sponsored by

This work made possible by Southwest Center for Microsystems Education (SCME), a National Science Foundation (NSF) funded Center through DUE grants #0830384, 0902411, and 1205138. Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the NSF. 

Cite this work

Researchers should cite this work as follows:

  • Southwest Center for Microsystems Education (SCME) (2017), "Learning Module: Crystallography Overview for MEMS," https://nanohub.org/resources/26438.

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Submitter

MJ Willis

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

Tags

  1. ATE Centers
  2. crystallography
  3. Crystal Planes
  4. K-12
  5. MEMS
  6. Miller Indices
  7. NEMS/MEMS
  8. SCME
  9. silicon wafers