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ECE 612 Lecture 18B: CMOS Process Flow
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Online Presentations | 18 Nov 2008 | Contributor(s):: Mark Lundstrom
For a basic, CMOS process flow for an STI (shallow trench isolation process), see: http://www.rit.edu/~lffeee/AdvCmos2003.pdf.This lecture is a condensed version of the more complete presentation (listed above) by Dr. Fuller.
ECE 612 Lecture 18A: CMOS Process Steps
Online Presentations | 12 Nov 2008 | Contributor(s):: Mark Lundstrom
Outline: 1) Unit Process Operations,2) Process Variations.