Process Lab: Defect-coupled diffusion

By Shuqing (Victor) Cao1; Yang Liu1; Peter Griffin1

1. Stanford University

This tool simulates dopant diffusion coupled with point defects.

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Version 1.1 - published on 30 Oct 2019

doi:10.21981/4TB9-S464 cite this

This tool is closed source.

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    Yaswanth Rangineni

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