MSE 582 Lecture 12: Analytical Electron Microscopy
MSE 582 Lecture 12: Analytical Electron Microscopy
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1. Lecture 12: Analytical electro…
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2. Outline
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3. Scattering in the TEM
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4. Energy Dispersive Spectroscopy…
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5. Ionization cross sections
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6. X-ray production
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7. Possible electron transitions …
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8. Fluorescence yield
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9. Continuous Background Bremsstr…
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10. Excited volume
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11. Example x-ray spectra (EDS)
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12. EDS Example
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13. EDS geometry
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14. X-ray spectrometers
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15. Spurious x-rays
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16. Quantification background subt…
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17. Quantification Cliff-Lorimer m…
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18. Electron Energy Loss Spectrosc…
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19. EELS Spectrometer
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20. What an EELS edge looks like
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21. Example EELS Spectra
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22. K and L Edges
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23. M and N edges
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24. EELS vs. Band structure
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25. Allowed transitions
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26. ELNES / EXELFS
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27. ELNES - "Fingerprinting"
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28. Comparison of collection EDS /…
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29. Spatial resolution
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30. Sensitivity of EDS & EELS
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31. Energy filtered imaging (EFTEM…
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32. EFTEM - example
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33. Conclusions
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34. References
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