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MSE 582 Lecture 6: Vacuum Science in EM

By Eric Stach

Brookhaven National Laboratory

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MSE 582 Lecture 6: Vacuum Science in EM

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1. Lecture6: Vacuum Science in EM 0

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2. Outline 59.893226559893229

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3. Very brief vacuum overview 125.55889222555889

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4. Very brief vacuum overview 244.97831164497833

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5. Very brief vacuum overview 270.970970970971

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6. Very brief vacuum overview 303.97063730397065

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7. Vacuum gauges Pirani 413.24657991324659

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8. Vacuum gauges Ion gauges (hot … 519.78645311978653

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9. Vacuum gauges Ion gauges (cold… 624.95829162495829

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10. "Mechanical" pumps 666.966966966967

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11. Diffusion pumps 843.84384384384384

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12. Turbomolecular pumps 1025.291958625292

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13. Ion pump 1147.681014347681

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14. Cryo Pumps / cold fingers 1294.6613279946614

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15. Vacuum system 1558.6586586586586

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16. Actual vacuum system 2000FX 1707.7744411077745

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17. Contamination 2018.9856523189858

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