ECE 606 L32.3: Modern MOSFET - Control of Threshold Voltage

By Gerhard Klimeck

Electrical and Computer Engineering, Purdue University, West Lafayette, IN

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Researchers should cite this work as follows:

  • Gerhard Klimeck (2023), "ECE 606 L32.3: Modern MOSFET - Control of Threshold Voltage," https://nanohub.org/resources/37204.

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  1. ECE606-Klimeck
  2. FinFET
  3. high-k metal gates
  4. MOSFET
  5. scattering
  6. threshold voltage
ECE 606 L32.3: Control of Threshold Voltage
  • S32.3 Control of threshold voltage 1. S32.3 Control of threshold vol… 0
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  • Section 32 Modern MOSFET 2. Section 32 Modern MOSFET 8.90890890890891
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  • Solution: Ultra-thin Body SOI 3. Solution: Ultra-thin Body SOI 21.25458792125459
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  • Example: FINFET, OmegaFET, X-FET 4. Example: FINFET, OmegaFET, X-F… 117.45078411745079
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  • Electro-Static Control in a GAA Nanowire nanowire tool on nanoHUB.org 5. Electro-Static Control in a GA… 168.03470136803472
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  • Quantization and Control of Fin-width 6. Quantization and Control of Fi… 280.18018018018017
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  • Motivation 7. Motivation 401.50150150150154
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  • Interface roughness scattering 8. Interface roughness scattering 462.56256256256256
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  • Difficulties: Interface roughness scattering 9. Difficulties: Interface roughn… 492.35902569235907
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  • Difficulties: Full band Tight-binding simulation 10. Difficulties: Full band Tight-… 528.6953620286954
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  • Variability in Vth at Low Doping 11. Variability in Vth at Low Dopi… 589.12245578912245
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  • Variability in Threshold Voltage 12. Variability in Threshold Volta… 684.718051384718
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  • Vth control by Substrate Bias 13. Vth control by Substrate Bias 735.03503503503509
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  • Vth control by Metal Work-function 14. Vth control by Metal Work-func… 773.67367367367365
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  • Quantization in Inversion 15. Quantization in Inversion "Exa… 822.18885552218887
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  • 16. "Exact" solution is not really… 881.08108108108115
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  • 17. "Exact" solution is not really… 942.27560894227565
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  • 18. "Exact" solution is not really… 953.42008675342015
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  • Tunneling Current 19. Tunneling Current 1013.8471805138472
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  • How to make Vth Roll-off small … 20. How to make Vth Roll-off small… 1025.9926593259927
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  • Advantages of High-k Dielectric … 21. Advantages of High-k Dielectri… 1085.0183516850184
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  • Section 32 Modern MOSFET 22. Section 32 Modern MOSFET 1128.8621955288622
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  • Section 32 Modern MOSFET 23. Section 32 Modern MOSFET 1137.5375375375377
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