Alternative Hitachi SEM Techniques

View Presentation

Additional materials available (4)

Category

Online Presentations

Published on

Abstract

Robert Passeri, Hitachi engineer, discusses STEM and low kV imaging techniques with the Hitachi SEM S4800.

Sponsored by

Birck Nanotechnology Center

Cite this work

Researchers should cite this work as follows:

  • (2022), "Alternative Hitachi SEM Techniques," https://nanohub.org/resources/36093.

    BibTex | EndNote

Time

Location

Rm 1001, Birck Nanotechnology Center, Purdue University, West Lafayette, IN

Tags

  1. carbon nanotubes
  2. field emission SEM (FESEM)
  3. Hitachi S-4800
  4. nanowires
  5. scanning electron microscopy (SEM)
  6. semiconductors
Alternative Hitachi SEM Techniques
  • FE SEM Training 1. FE SEM Training 0
    00:00/00:00
  • Course contents 2. Course contents 30.13013013013013
    00:00/00:00
  • Hitachi S-4800 Field Emission SEM 3. Hitachi S-4800 Field Emission … 33.433433433433436
    00:00/00:00
  • Hitachi S-4800 Type II specifications 4. Hitachi S-4800 Type II specifi… 50.617283950617285
    00:00/00:00
  • Examples of S-4800 performance 5. Examples of S-4800 performance 72.572572572572582
    00:00/00:00
  • High resolution SE image at 15kv 6. High resolution SE image at 15… 86.152819486152822
    00:00/00:00
  • S-4800 Resolution 7. S-4800 Resolution 102.2022022022022
    00:00/00:00
  • Basic Theory of SEM 8. Basic Theory of SEM 116.21621621621622
    00:00/00:00
  • Beam Formation: Electronic Sources 9. Beam Formation: Electronic Sou… 125.09175842509177
    00:00/00:00
  • What is Field Emission? 10. What is Field Emission? 176.30964297630965
    00:00/00:00
  • Field Emission Tip 11. Field Emission Tip 179.41274607941276
    00:00/00:00
  • Accelerating/Extraction Voltage 12. Accelerating/Extraction Voltag… 220.78745412078746
    00:00/00:00
  • Flashing Voltage 13. Flashing Voltage 235.03503503503504
    00:00/00:00
  • Flashing Should Be Done Now 14. Flashing Should Be Done Now 258.49182515849185
    00:00/00:00
  • Beam Formation: Purpose of the lenses 15. Beam Formation: Purpose of the… 287.75442108775445
    00:00/00:00
  • Basic lens system 16. Basic lens system 290.12345679012344
    00:00/00:00
  • The Column – Probe Current/Spot Size 17. The Column – Probe Current/S… 327.52752752752752
    00:00/00:00
  • Beam Formatioin: Lens aberrations 18. Beam Formatioin: Lens aberrati… 356.75675675675677
    00:00/00:00
  • Beam Formation: Correcting Astigmatism 19. Beam Formation: Correcting Ast… 387.08708708708713
    00:00/00:00
  • Beam Formation: Correcting Astigmatism 20. Beam Formation: Correcting Ast… 416.91691691691693
    00:00/00:00
  • Beam Formation: Correcting Astigmatism 21. Beam Formation: Correcting Ast… 429.06239572906242
    00:00/00:00
  • Hitachi Single-Pole Snorkel Lens 22. Hitachi Single-Pole Snorkel Le… 466.56656656656656
    00:00/00:00
  • Beam Formation: Depth of Field 23. Beam Formation: Depth of Field 516.04938271604942
    00:00/00:00
  • The column – Objective Aperture 24. The column – Objective Apert… 537.37070403737073
    00:00/00:00
  • Beam Formation: Resolution limits 25. Beam Formation: Resolution lim… 569.76976976976982
    00:00/00:00
  • Beam-Sample Interactions 26. Beam-Sample Interactions 572.53920587253924
    00:00/00:00
  • Beam-Sample Interactions: Interaction volume 27. Beam-Sample Interactions: Inte… 603.43677010343674
    00:00/00:00
  • Beam-Sample Interactions: Examples of interaction volume 28. Beam-Sample Interactions: Exam… 657.3907240573908
    00:00/00:00
  • Beam-Sample Interactions: Interaction volume is density dependent 29. Beam-Sample Interactions: Inte… 685.48548548548547
    00:00/00:00
  • Beam-Sample Interactions: Interaction volume summary 30. Beam-Sample Interactions: Inte… 725.925925925926
    00:00/00:00
  • Beam-Sample Interactions: Interaction volume exanples 31. Beam-Sample Interactions: Inte… 773.9072405739073
    00:00/00:00
  • Beam-Sample Interactions: Interaction volume 32. Beam-Sample Interactions: Inte… 795.66232899566239
    00:00/00:00
  • Significance of imaging at low acc. Voltage 33. Significance of imaging at low… 823.95729062395731
    00:00/00:00
  • Observation at low accelerating voltages 34. Observation at low acceleratin… 851.5849182515849
    00:00/00:00
  • Flexible detection system 35. Flexible detection system 874.67467467467475
    00:00/00:00
  • Beam-Sample Interactions: Signal Collection, SE 36. Beam-Sample Interactions: Sign… 925.55889222555891
    00:00/00:00
  • Beam-Sample Interactions: Secondary Electrons 37. Beam-Sample Interactions: Seco… 930.59726393059725
    00:00/00:00
  • Beam/Specimen Interactions 38. Beam/Specimen Interactions 948.048048048048
    00:00/00:00
  • Energy spectrum of the electronics emitted from a specimen 39. Energy spectrum of the electro… 982.28228228228227
    00:00/00:00
  • Lower SE Detector 40. Lower SE Detector 1010.7774441107775
    00:00/00:00
  • Metal Fracture 41. Metal Fracture 1023.9906573239907
    00:00/00:00
  • Comparison of Upper and Lower SE detectors 42. Comparison of Upper and Lower … 1033.4000667334
    00:00/00:00
  • Upper SE Detector 43. Upper SE Detector 1064.8982315648982
    00:00/00:00
  • Comparison of Upper SE and Lower SE detectors 44. Comparison of Upper SE and Low… 1098.4984984984985
    00:00/00:00
  • Beam-Sample Interactions: Signal Collection 45. Beam-Sample Interactions: Sign… 1120.1534868201536
    00:00/00:00
  • Beam-Sample Interactions: Signal Collection, BSE 46. Beam-Sample Interactions: Sign… 1133.3667000333667
    00:00/00:00
  • Backscattered Electron 47. Backscattered Electron 1146.0794127460795
    00:00/00:00
  • Beam-Sample Interactions: Signal Collection 48. Beam-Sample Interactions: Sign… 1173.6069402736071
    00:00/00:00
  • Beam-Sample Interactions: Signal Collection 49. Beam-Sample Interactions: Sign… 1214.9816483149816
    00:00/00:00
  • Hitachi's Patented ExB Filter 50. Hitachi's Patented ExB Filter 1252.8528528528529
    00:00/00:00
  • Image information: SE & BSE 51. Image information: SE & BSE 1276.3763763763764
    00:00/00:00
  • Pure SE information using the ExB filter (no BSE) 52. Pure SE information using the … 1301.3346680013346
    00:00/00:00
  • SE + BSE Information 53. SE + BSE Information 1325.3920587253922
    00:00/00:00
  • Catalyst (Pt/C) 54. Catalyst (Pt/C) 1329.2292292292293
    00:00/00:00
  • SE + BSE(L) Information using ExB filter 55. SE + BSE(L) Information using … 1329.8631965298632
    00:00/00:00
  • BSE(H) Information only (no SE) 56. BSE(H) Information only (no SE… 1354.1875208541876
    00:00/00:00
  • BSE Information 57. BSE Information 1373.9072405739073
    00:00/00:00
  • Untitled 58. Untitled 1374.7414080747415
    00:00/00:00
  • Nano-wires 59. Nano-wires 1396.8635301968636
    00:00/00:00
  • MEMS Application 60. MEMS Application 1419.5862529195863
    00:00/00:00
  • MEMS Application 61. MEMS Application 1444.9783116449785
    00:00/00:00
  • Why Low Voltage SEM? 62. Why Low Voltage SEM? 1461.0610610610611
    00:00/00:00
  • Beam Deceleration 63. Beam Deceleration 1488.0213546880213
    00:00/00:00
  • S-4800 Retarding Mode Operation 64. S-4800 Retarding Mode Operatio… 1554.220887554221
    00:00/00:00
  • Membrane Filter 65. Membrane Filter 1560.3937270603938
    00:00/00:00
  • Photo Resist 66. Photo Resist 1561.594928261595
    00:00/00:00
  • ArF Resist 67. ArF Resist 1562.7627627627628
    00:00/00:00
  • Why the Increase in SEM-based STEM Imaging? 68. Why the Increase in SEM-based … 1596.1961961961963
    00:00/00:00
  • BF/DF STEM (1): a simple STEM configuration 69. BF/DF STEM (1): a simple STEM … 1641.9753086419753
    00:00/00:00
  • Simultaneous STEM Imaging: BF and DF 70. Simultaneous STEM Imaging: BF … 1669.235902569236
    00:00/00:00
  • SE and STEM for Nano-materials 71. SE and STEM for Nano-materials 1723.4234234234234
    00:00/00:00
  • STEM Imaging: Brightfield 72. STEM Imaging: Brightfield 1749.2158825492158
    00:00/00:00
  • STEM: Bright Field Imaging 73. STEM: Bright Field Imaging 1760.694027360694
    00:00/00:00
  • Carbon nanotube 74. Carbon nanotube 1762.1287954621289
    00:00/00:00
  • STEM of Semiconductors 75. STEM of Semiconductors 1797.3640306973641
    00:00/00:00
  • STEM of Semiconductors 76. STEM of Semiconductors 1798.7987987987988
    00:00/00:00
  • Human Nerve Tissue 77. Human Nerve Tissue 1818.7854521187855
    00:00/00:00
  • STEM of biological sections 78. STEM of biological sections 1819.285952619286
    00:00/00:00
  • STEM of virus particles 79. STEM of virus particles 1819.9532866199534
    00:00/00:00
  • STEM: Dark Field Imaging 80. STEM: Dark Field Imaging 1820.5538872205539
    00:00/00:00
  • Carbon Nanotubes 81. Carbon Nanotubes 1821.287954621288
    00:00/00:00
  • Untitled 82. Untitled 1823.0897564230897
    00:00/00:00
  • Untitled 83. Untitled 1852.7527527527527
    00:00/00:00
  • Summary 84. Summary 1929.9966633299966
    00:00/00:00
  • STEM/EDX 85. STEM/EDX 1984.4511177844513
    00:00/00:00
  • S-4800 86. S-4800 1991.8251584918253
    00:00/00:00
  • S-4800 87. S-4800 2002.2022022022022
    00:00/00:00
  • S-4800 Pt/C Catalist 88. S-4800 Pt/C Catalist 2017.017017017017
    00:00/00:00
  • S-4800 MWCNT 89. S-4800 MWCNT 2035.8024691358025
    00:00/00:00
  • S-4800 Carbon nanotubes 90. S-4800 Carbon nanotubes 2042.5425425425426
    00:00/00:00
  • S-4800 Carbon nanotubes 91. S-4800 Carbon nanotubes 2051.2846179512849
    00:00/00:00
  • S-4800 Cu Wiring (FIB Milled) 92. S-4800 Cu Wiring (FIB Milled) 2076.6433099766432
    00:00/00:00
  • S-4800 93. S-4800 2145.0450450450453
    00:00/00:00
  • Untitled 94. Untitled 2610.6773440106776
    00:00/00:00
  • Observation at low accelerating voltages 95. Observation at low acceleratin… 2758.7253920587254
    00:00/00:00
Pop Out