Recent advances in X-ray microscopy (XRM) instrumentation and methods have opened the door for a variety of new opportunities in 3D characterization and visualization. Specifically, x-ray microscopes have uniquely incorporated synchrotron-influenced optical and detection systems to push the boundaries of laboratory XRM, enabling flexible 3D imaging capabilities for a wide variety of applications. The high resolution and high contrast of these microscopes have been successfully applied to samples from the life sciences, materials science, electronics, and geosciences fields, covering a wide range of low and high Z samples and sample sizes. This talk will cover an overview of XRM technology as well as prominent examples and applications.

Nondestructive characterization creates unique opportunities for understanding and investigating 3D structures. The effect of time or stimuli on a sample or specimen can be probed through successive scans of the same sample (i.e. 4D imaging). The response of the sample can be described by correlation of data sets at multiple time steps, providing valuable insight into such processes as microstructural evolution and degradation. Incorporating in situ stages, test chambers, and flexible sample environments can reveal a sample within its native state or under certain imposed environmental conditions.

The nondestructive capability also enables new possibilities for correlative microscopy, incorporating complementary light and electron microscopy methods. This general approach leverages the variety of modalities and length scales accessible across multiple instruments to attain more comprehensive characterization than by use of any single tool. Utilizing XRM ‘scouting’ capabilities can be exploited for locating sub-surface regions of interest for future destructive analysis, for example using focused ion beam scanning electron microscopy.

Department of Physics and Astronomy

Researchers should cite this work as follows:

• John Kelley (2019), "Introduction to X-ray Microscopy (XRM): Technology and Applications for Lab-based Non-destructive, High-resolution 3D Imaging and Analysis," https://nanohub.org/resources/30923.

  BibTex | EndNote

1. characterization
2. Imaging
3. materials science
4. microscopy
5. NCN Group - Characterization and Metrology
6. x-ray microscopy