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ME 290R Lecture 12.2: Scanning-beam Lithography and Directed Self-assembly II

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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ME 290R Lecture 12.2: Scanning-beam Lithography and Directed Self-assembly II

by: Taylor, Hayden

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1. Lecture 12.2: Scanning-‐be… 0

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2. Methods of defining patterns 11.344678011344678

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3. Could e-beam lithography chall… 230.26359693026362

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4. Parallelized e-beam systems in… 277.01034367701033

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5. Scalpel 291.55822489155821

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6. The MAPPER system 560.82749416082754

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7. REBL (Reflective e-Beam Lithog… 736.33633633633633

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8. Economics of e-beam lithograph… 922.92292292292291

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9. Agenda 945.37871204537873

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10. Block copolymers for directed … 1012.1788455121789

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11. Blending DSA and e-beam lithog… 1425.291958625292

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12. Graphoepitaxy for contact hole… 1794.4944944944946

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13. Graphoepitaxy for contact hole… 1877.7777777777778

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14. Using NIL to guide block copol… 1936.8368368368369

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