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ME 290R Lecture 11: Extreme UV Lithography

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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ME 290R Lecture 11: Extreme UV Lithography

by: Taylor, Hayden

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1. Lecture 11: Extreme UV Lithogr… 0

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2. outline 7.9746413079746414

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3. Vacuum Ultraviolet Transmissio… 13.279946613279947

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4. EUV 13.5 nm Projection 23.990657323990657

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5. EUVL Engineering Test Stane 230.93093093093094

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6. NXE platform improving with NX… 240.5739072405739

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7. EUV mask structure 241.57490824157492

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8. Phase-shift Mask Techniques 654.2876209542876

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9. EUV Advantages and Challenges 655.02168835502175

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10. EUVL simplifies process and re… 656.55655655655653

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