Physical and Chemical Vapor Deposition
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Abstract
Outline
- Plasma Deposition Introduction
- Deposition Coverage
- The Six Basic Steps of Chemical Vapor Deposition
- Film Growth
- Issues Concerning PECVD Deposition
- Types of PECVD Deposition
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The Nanotechnology Applications and Career Knowledge (NACK) Network
Funded, in part, by a grant from the National Science Foundation. DUE 1205105
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