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Learning Module: MEMS Micromachining Overview
Teaching Materials | 22 Jun 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage...
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Learning Module: Introduction to Actuators
Teaching Materials | 17 May 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module is one of three SCME modules that discuss the types of components found in microelectromechanical systems (MEMS). This module covers "actuators" - what they are, how they work, and how they are used in both macro and micro-sized systems. An activity...
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Learning Module: MEMS Applications Overview
Teaching Materials | 07 Mar 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)
Microelectromechcanical Systems (MEMS) rotate the screens on your smartphones, trigger airbags in a car crash, and beat the hearts of patients with serious heart problems. In this learning module you are introduced to some of the many applications of MEMS and then allowed to explore MEMS...
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Learning Module: Microcantilevers
Teaching Materials | 09 Feb 2017 | Contributor(s):: Southwest Center for Microsystems Education (SCME)
This learning module introduces you to the microcantilever, its applications in micro and nanotechnologies, its use in sensor arrays, and how it works in both static and dynamic modes of operation. There is a pre and post-test, four (4) informational units (PKs), and two (2)...
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Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors
Online Presentations | 10 Jun 2014 | Contributor(s):: Dana Weinstein, Luca Daniel, Bichoy W. Bahr
This talk presents the latest results of the CMOS Resonant Body Transistor (RBT) fabricated in standard 32nm SOI CMOS. Using phononic crystals formed from the CMOS stack, we will discuss methods for 10x improvement of Q and suppression of spurious modes.
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RF Solid-State Vibrating Transistors
Online Presentations | 15 Feb 2014 | Contributor(s):: Dana Weinstein
In this talk, I will discuss the Resonant Body Transistor (RBT), which can be integrated into a standard CMOS process. The first hybrid RF MEMS-CMOS resonators in Si at the transistor level of IBM’s SOI CMOS process, without any post-processing or packaging will be described. ...
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ME 517: Micro- and Nanoscale Processes
Courses | 05 Feb 2014 | Contributor(s):: Steve Wereley
This course will provide the student with the tools to analyze statics, dynamics, surface phenomena, and fluid dynamics problems at the micron scale. Specific laboratory- on-a-chip (LOC) and microelectromechanical system (MEMS) devices will be analyzed quantitatively using Finite Element Methods.
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MEMSLab
Tools | 05 Jun 2013 | Contributor(s):: Oluwatosin Adeosun, Sambit Palit, Ankit Jain, Muhammad Alam, Xin Jin
Simulation suite for electromechanical actuators
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What I've Learned Over Two Decades in MEMS
Online Presentations | 09 Jul 2013 | Contributor(s):: Buzz Hardy
What do Sean Penn, Justin Bieber, Bob Marley, and MEMS have in common?
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Capacitance Modeling Tool Using Schwarz-Christoffel Mapping
Tools | 20 Oct 2010 | Contributor(s):: Fengyuan (Thomas) Li, jason clark
Calculate the capacitance between two conductors that may be represented as simply-connected polygonal geometries in 2.5D with Dirichlet boundary conditions
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Comb Drive Levitation
Tools | 19 Jan 2010 | Contributor(s):: Fengyuan (Thomas) Li, jason clark
Model comb drive levitation effect with Schwarz-Christoffel based algorithm
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SugarCube
Tools | 19 Jan 2010 | Contributor(s):: jason clark, Quincy Clark
MEMS design, modeling, and simulation
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SUGARCube - ADXL Accelerometer
Tools | 03 May 2009 | Contributor(s):: Fengyuan Li, Jason Clark
Modeling and simulationg of ADXL accelerometer
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Q-factor calculator with Uncertainty Quantification
Tools | 06 May 2009 | Contributor(s):: Sruti Chigullapalli, Xiaohui Guo, Alina Alexeenko
Calculates squeeze-film damping Q-factors of microcantilevers for arbitrary ambient pressures
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SUGARCube - Chevron Thermal Actuator
Tools | 27 Apr 2009 | Contributor(s):: Fengyuan Li, Jason Clark
Modeling and Simulation of a Chevron Thermal Actuator
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SUGARCube - Netlist Input Tool
Tools | 15 Jul 2008 | Contributor(s):: Fengyuan Li, Jason Clark
Simulate the user input netlist by SUGAR2.0
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MEMS Resonator - Tang
Tools | 04 Jan 2009 | Contributor(s):: Fengyuan Li, Jason Clark
Parametric Tang's Comb-Drive Modeling and Simulation
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SUGARCube - Cantilever
Tools | 01 May 2008 | Contributor(s):: Fengyuan Li, Brandon Patterson, Jason Clark, yi zeng
Cantilever modeling and simulation with different loads
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NCN NEMS: Tutorials
Series | 19 Jun 2008
From among the many tutorial lectures available on the nanoHUB, we list a few that convey new approaches to the development of new kinds of nano-electro-mechanical systems and devices.
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BNC Annual Research Review: An Introduction to PRISM and MEMS Simulation
Online Presentations | 04 Jun 2008 | Contributor(s):: Jayathi Murthy
This presentation is part of a collection of presentations describing the projects, people, and capabilities enhanced by research performed in the Birck Center, and a look at plans for the upcoming year.