MEMS and NEMS
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Simulation Tools
MEMSLab
This tool is created to allow users to enter basic information about a MEMS actuator and obtain a reasonably accurate estimation of the actuation response of the actuator. A compact model based on a scaling theory developed in Ref. [1] provides an almost instantaneous estimation of the actuation voltages (pull-in voltage and pull-out voltage) and the hysteretic CV characteristics (for both below pull-in and post pull-in states). A more comprehensive numerical simulation option, which employs the Kirchoff-Love plate equation, is also available. Quasi-static and dynamic response for cantilever, fixed-fixed and circular beam shapes can be obtained using the numerical simulation. A method-of-moments based 3D Poisson solver can also be invoked if necessary. For users who want to understand the basics of MEMS actuator operation, quasi-static and dynamic simulations can be performed for a simple spring-mass model.
SUGARCube
SUGARCube Cantilever
SUGARCube Tang Resonator
SUGARCube ADXL Accelerometer
SUGARCube Chevron Thermal Actuator
SUGARCube Netlist Input Tool
Comb Drive Levitation
Capacitance Modeling Tool
Q-Factor calculator with Uncertainty Quantification
CENEMS
Carbon nanotube based NEMS with cantilever structure
By Pradeep Kumar Gudla, Aswin Kannan, Zhi Tang, Narayan Aluru, University of Illinois at Urbana-Champaign (2009)