Tags: NEMS/MEMS

More tags

Description

The term Nanoelectromechanical systems or NEMS is used to describe devices integrating electrical and mechanical functionality on the nanoscale. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.

Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology.

MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors

Learn more about NEMS/MEMS from the many resources on this site, listed below. More information on NEMS/MEMS can be found here.

Resources (81-100 of 224)

  1. Learning Module: Deposition Processes Overview for Microsystems

    Teaching Materials | 28 Apr 2016 | Contributor(s):: Support Center for Microsystems Education (SCME), MJ Willis

    This learning module is an overview of the common deposition processes used for the fabrication of micro-size devices.  This learning module discusses thermal oxidation, chemical deposition and physical deposition processes.  Activities are provided for further exploration into these...

  2. MEMOSA-based 2-Dimensional Pull-In Voltage Simulation

    Tools | 19 May 2015 | Contributor(s):: Peter Kolis

    Determine the pull-in voltage of a membrane under electrostatic actuation using the MEMOSA FVM module

  3. Creep deformation in RF-MEMS

    Tools | 15 Jan 2015 | Contributor(s):: Marisol Koslowski, Alejandro Strachan, Gabriela Venturini, Diego Fernando Cifuentes Pardo, Guillermo Andres Roman

    Simulates creep deformation in fixed - fixed beam MEMS model

  4. Piezoelectric tool presentation

    Presentation Materials | 15 Oct 2014 | Contributor(s):: Jorge Mario Monsalve, Alba Graciela Avila

    An overview of the capabilities and functionalities of the "Piezoelectric Vibrational Energy Harvesting Tool"

  5. MEMS Piezoelectric Vibrational Energy Harvesting Lab

    Tools | 16 Jun 2014 | Contributor(s):: Jorge Mario Monsalve, German Felipe Giraldo, Alba Graciela Avila, Gerhard Klimeck

    Simulate the harvested electrical power from mechanical vibrations using a piezoelectric cantilevered beam

  6. Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors

    Online Presentations | 06 Jun 2014 | Contributor(s):: Dana Weinstein, Luca Daniel, Bichoy W. Bahr

    This talk presents the latest results of the CMOS Resonant Body Transistor (RBT) fabricated in standard 32nm SOI CMOS. Using phononic crystals formed from the CMOS stack, we will discuss methods for 10x improvement of Q and suppression of spurious modes.

  7. RF Solid-State Vibrating Transistors

    Online Presentations | 14 Feb 2014 | Contributor(s):: Dana Weinstein

    In this talk, I will discuss the Resonant Body Transistor (RBT), which can be integrated into a standard CMOS process. The first hybrid RF MEMS-CMOS resonators in Si at the transistor level of IBM’s SOI CMOS process, without any post-processing or packaging will be described. ...

  8. ME 517: Micro- and Nanoscale Processes

    Courses | 03 Feb 2014 | Contributor(s):: Steve Wereley

    This course will provide the student with the tools to analyze statics, dynamics, surface phenomena, and fluid dynamics problems at the micron scale. Specific laboratory- on-a-chip (LOC) and microelectromechanical system (MEMS) devices will be analyzed quantitatively using Finite Element Methods.

  9. Uniaxial and Biaxial Stress Strain Calculator for Semiconductors

    Tools | 16 Jan 2014 | Contributor(s):: Jamie Teherani

    Simulate stress or strain along user-defined Miller directions for arbitrary stress/strain configurations.

  10. MEMSLab

    Tools | 05 Jun 2013 | Contributor(s):: Oluwatosin Adeosun, Sambit Palit, Ankit Jain, Muhammad Alam, Xin Jin

    Simulation suite for electromechanical actuators

  11. What I've Learned Over Two Decades in MEMS

    Online Presentations | 09 Jul 2013 | Contributor(s):: Buzz Hardy

    What do Sean Penn, Justin Bieber, Bob Marley, and MEMS have in common?

  12. Vacuum Nanosystemsfor Energy Conversion

    Online Presentations | 30 Jan 2013 | Contributor(s):: Roger T. Howe

    Micro and nano-fabricated sensors (e.g., accelerometers and gyroscopes) and actuators (e.g., light valve chips for projection and cell-phone displays) have become commonplace in recent years. Some of these devices must operate in a hermetically sealed, lowpressure ambient, a need that motivated...

  13. Illinois CNST Annual Nanotechnology Workshop 2011: Nanoscale Force Sensors for Biological Applications

    Online Presentations | 08 May 2012 | Contributor(s):: Taher A. Saif

  14. In Search of a Better MEMS-Switch: An Elementary theory of how nanostructured dielectrics may soften landing, increase travel range, and decrease energy dissipation

    Online Presentations | 03 May 2012 | Contributor(s):: Muhammad Alam

    In this talk, I will discuss an elementary theory of the role of nanostructured electrodes in addressing some of the challenges from a fundamentally different perspective. The goal is to start a conversation regarding the viability of the approaches suggested and see if the perspective offered is...

  15. Near-field radiative heat transfer and Casimir Force Measurement

    Online Presentations | 19 Dec 2009 | Contributor(s):: Joel Chevrier

    This presentation first makes a simple introduction on how the charge fluctuations give rises to these effects that are nowadays most effectively detected using MEMS or AFM technologies. This will lead to question the relevance of these effects in the use of MEMS. After description of our...

  16. Particle Simulations of Ion Generation and Transport in Microelectromechanical Systems and Micropropulsion

    Online Presentations | 29 May 2012 | Contributor(s):: Venkattraman Ayyaswamy

    The first part of the talk deals with use of the PIC method with Monte Carlo collisions (MCC) between electrons and the ambient neutral gas to develop models to predict charge accumulation, breakdown voltage, etc. for various ambient gases, gap sizes, cathode material, and frequency of applied...

  17. Illinois BioNanotechnology Seminar Series Fall 2011: Deconvolving Stiffness in MEMS Pedestal Cell Mass Measurements

    Online Presentations | 03 Nov 2011 | Contributor(s):: Elise Corbin

    The complex relationships between a cell's behavior and the physical properties of both itself and its environment have long been of interest. Specifically, the understanding the mechanisms through which a cell's physical properties influence cell growth, cell differentiation, cell cycle...

  18. Illinois CNST Annual Nanotechnology Workshop 2010 Lecture 12: Multiscale Analysis of Silicon NEMS

    Online Presentations | 30 Jan 2011 | Contributor(s):: Narayan Aluru

  19. Capacitance Modeling Tool Using Schwarz-Christoffel Mapping

    Tools | 20 Oct 2010 | Contributor(s):: Fengyuan (Thomas) Li, jason clark

    Calculate the capacitance between two conductors that may be represented as simply-connected polygonal geometries in 2.5D with Dirichlet boundary conditions

  20. 2010 MNTL UIUC Symposium Lecture 4 - MicroElectronics

    Online Presentations | 23 Jul 2010 | Contributor(s):: Shyh-Chiang Shen