Process Lab:Oxidation

By Shuqing (Victor) Cao1; Yang Liu1; Peter Griffin1

1. Stanford University

Integrated Circuit Fabrication Process Simulation

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Version 1.1 - published on 30 Oct 2019

doi:10.21981/18BY-KY85 cite this

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Usage

World usage

Location of all "Process Lab:Oxidation" Users Since Its Posting

Cumulative Simulation Users

2,874

11 122 127 144 169 214 221 228 237 248 256 265 292 376 383 388 394 401 410 416 418 420 428 435 438 442 446 447 461 479 482 484 485 489 489 490 491 493 495 499 514 516 518 520 526 529 529 529 530 531 535 537 539 546 549 559 572 573 577 581 583 593 602 605 608 620 621 629 637 646 646 646 661 684 685 687 688 699 700 728 732 732 732 732 733 736 737 738 739 741 744 748 762 768 769 770 770 771 772 777 778 780 802 818 832 832 836 842 860 871 878 886 888 906 933 946 963 964 967 976 980 986 988 997 1,025 1,068 1,090 1,119 1,131 1,131 1,148 1,175 1,205 1,226 1,242 1,253 1,261 1,280 1,302 1,329 1,337 1,338 1,346 1,423 1,465 1,476 1,487 1,490 1,497 1,506 1,517 1,525 1,531 1,533 1,549 1,614 1,639 1,655 1,664 1,664 1,664 1,678 1,682 1,703 1,713 1,713 1,764 1,811 1,869 1,899 1,914 1,915 1,940 1,948 1,980 2,016 2,143 2,150 2,153 2,171 2,186 2,192 2,208 2,224 2,227 2,244 2,273 2,294 2,305 2,305 2,309 2,315 2,370 2,406 2,436 2,444 2,464 2,471 2,525 2,548 2,556 2,557 2,560 2,565 2,610 2,667 2,767 2,776 2,799 2,806 2,851 2,874

Simulation Runs

47,879

161 8522 8684 8789 8875 9340 9378 9433 9476 9513 9528 9557 9936 14930 15047 15113 15133 15286 15333 15385 15400 15444 15560 15587 15601 15648 15712 15717 15981 16210 16257 16287 16290 16301 16302 16314 16321 16327 16332 16358 16582 16609 16620 16648 16708 16771 16771 16771 16777 16783 16798 16837 16874 16928 16982 17066 17826 17841 17863 17893 17909 18001 18128 18161 18229 18695 18722 18904 19078 19200 19209 19212 19316 19775 19810 19834 19838 20132 20140 21057 21449 21449 21458 21460 21464 21507 21508 21518 21519 21528 21601 21664 22279 22332 22346 22347 22347 22355 22373 22430 22434 22437 23908 24394 25190 25190 25222 25246 25620 25668 25809 25911 25915 26083 26558 26836 27495 27497 27515 27574 27852 28947 29230 29613 30019 30696 31116 32249 32962 32964 33388 33576 34105 34373 34703 34919 34961 35302 35442 36019 36415 36417 36539 37759 38361 38480 38554 38584 38619 38640 38662 38835 39032 39034 39058 39368 39456 39523 39593 39609 40109 39830 39865 40002 40228 40229 40630 41041 41509 41726 41918 41921 42040 42056 42107 42253 43257 43311 43316 43401 43459 43477 43550 43624 43664 43875 43953 44144 44422 44429 44495 44522 44755 44977 45164 45231 45362 45417 45541 45704 45835 45859 45866 45917 46312 46733 47464 47509 47595 47655 47797 47879
Overview
Average Total
Wall Clock Time 47.65 minutes 1800.23 days
CPU time 0.6 seconds 8.99 hours
Interaction Time 13.04 minutes 492.74 days