ECE 695Q: Nanometer Scale Patterning and Processing
Courses | 11 Jul 2016 | Contributor(s):: Minghao Qi
This course is a top-down approach to the fabrication of nanometer-scale (<100nm) structures. Principles of lithography, film deposition, reactive-ion etch and planarization are presented. The couse provides a survey of state-of-the-art nanofabrication techniques.