The term Nanoelectromechanical systems or NEMS is used to describe devices integrating electrical and mechanical functionality on the nanoscale. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.
Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology.
MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre. They usually consist of a central unit that processes data, the microprocessor and several components that interact with the outside such as microsensors
Learn more about NEMS/MEMS from the many resources on this site, listed below. More information on NEMS/MEMS can be found here.