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SCME and URE Program – It’s about the Students!
Online Presentations | 28 Oct 2020 | Contributor(s):: Matthias Pleil, The Micro Nano Technology - Education Center
This session will be talking about his 2021 MEMS workshop and the upcoming URE opportunities at the University of New Mexico.
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MEMS Resonators as an Enabling Technology
Online Presentations | 07 Aug 2019 | Contributor(s):: Dana Weinstein
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ME 290R Lecture 9: Lithography for MEMS and Microfluidics
Online Presentations | 08 May 2019 | Contributor(s):: Taylor, Hayden
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Creating Inflections: DARPA’s Electronics Resurgence Initiative
Online Presentations | 09 Jan 2019 | Contributor(s):: William Chappell
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Microfabrication, Characterization and Sensor Development in the Industrial Space
Online Presentations | 07 Nov 2018 | Contributor(s):: Nithin Raghunathan
The Birck Nanotechnology center offers a variety of capabilities especially in general microfabrication, electrical and physical characterization. With regards to microfabrication, the center features a variety of toolsets to enable fabrication of most devices from scratch to finish. These...
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[Illinois] Piezoelectric MEMS Devices for Future RF Front Ends
Online Presentations | 13 Apr 2017 | Contributor(s):: Songbin Gong
9/8/2016 MNTL Industry Affiliates Program
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[Illinois] Designing Intelligent Nano/Microbots: Fantastic Voyage
Online Presentations | 21 Jun 2016 | Contributor(s):: Ayusman Sen
FNANO Conference 2015
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Design and Compact Modeling of CMOS-MEMS Resonant Body Transistors
Online Presentations | 10 Jun 2014 | Contributor(s):: Dana Weinstein, Luca Daniel, Bichoy W. Bahr
This talk presents the latest results of the CMOS Resonant Body Transistor (RBT) fabricated in standard 32nm SOI CMOS. Using phononic crystals formed from the CMOS stack, we will discuss methods for 10x improvement of Q and suppression of spurious modes.
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RF Solid-State Vibrating Transistors
Online Presentations | 15 Feb 2014 | Contributor(s):: Dana Weinstein
In this talk, I will discuss the Resonant Body Transistor (RBT), which can be integrated into a standard CMOS process. The first hybrid RF MEMS-CMOS resonators in Si at the transistor level of IBM’s SOI CMOS process, without any post-processing or packaging will be described. ...
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What I've Learned Over Two Decades in MEMS
Online Presentations | 10 Jul 2013 | Contributor(s):: Buzz Hardy
What do Sean Penn, Justin Bieber, Bob Marley, and MEMS have in common?
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Vacuum Nanosystemsfor Energy Conversion
Online Presentations | 01 Feb 2013 | Contributor(s):: Roger T. Howe
Micro and nano-fabricated sensors (e.g., accelerometers and gyroscopes) and actuators (e.g., light valve chips for projection and cell-phone displays) have become commonplace in recent years. Some of these devices must operate in a hermetically sealed, lowpressure ambient, a need that motivated...
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Illinois CNST Annual Nanotechnology Workshop 2011: Nanoscale Force Sensors for Biological Applications
Online Presentations | 13 Jun 2012 | Contributor(s):: Taher A. Saif
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In Search of a Better MEMS-Switch: An Elementary theory of how nanostructured dielectrics may soften landing, increase travel range, and decrease energy dissipation
Online Presentations | 06 Jun 2012 | Contributor(s):: Muhammad Alam
In this talk, I will discuss an elementary theory of the role of nanostructured electrodes in addressing some of the challenges from a fundamentally different perspective. The goal is to start a conversation regarding the viability of the approaches suggested and see if the perspective offered is...
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Near-field radiative heat transfer and Casimir Force Measurement
Online Presentations | 30 May 2012 | Contributor(s):: Joel Chevrier
This presentation first makes a simple introduction on how the charge fluctuations give rises to these effects that are nowadays most effectively detected using MEMS or AFM technologies. This will lead to question the relevance of these effects in the use of MEMS. After description of our...
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Particle Simulations of Ion Generation and Transport in Microelectromechanical Systems and Micropropulsion
Online Presentations | 29 May 2012 | Contributor(s):: Venkattraman Ayyaswamy
The first part of the talk deals with use of the PIC method with Monte Carlo collisions (MCC) between electrons and the ambient neutral gas to develop models to predict charge accumulation, breakdown voltage, etc. for various ambient gases, gap sizes, cathode material, and frequency of applied...
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Illinois BioNanotechnology Seminar Series Fall 2011: Deconvolving Stiffness in MEMS Pedestal Cell Mass Measurements
Online Presentations | 05 Dec 2011 | Contributor(s):: Elise Corbin
The complex relationships between a cell's behavior and the physical properties of both itself and its environment have long been of interest. Specifically, the understanding the mechanisms through which a cell's physical properties influence cell growth, cell differentiation, cell cycle...
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Illinois CNST Annual Nanotechnology Workshop 2010 Lecture 12: Multiscale Analysis of Silicon NEMS
Online Presentations | 02 May 2011 | Contributor(s):: Narayan Aluru
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2010 MNTL UIUC Symposium Lecture 4 - MicroElectronics
Online Presentations | 09 Aug 2010 | Contributor(s):: Shyh-Chiang Shen
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2009 GEM4 Summer School - University of Illinois at Urbana-Champaign Lecture 5: Mechanics insights into the pathophysiology of human disease; Microfluidics approaches to studying human diseases
Online Presentations | 20 Jul 2010 | Contributor(s):: Chwee Teck Lim
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Peanuts vs. Pyramids: Two Perspectives on MEMS
Online Presentations | 29 Dec 2009 | Contributor(s):: Stephen D. Senturia
MEMS, the acronym for Micro-electromechanical Systems, also known simply as “Micro-systems,” come in two main types: commodity products (the peanuts) and MEMS-enabled products (the pyramids, or, more correctly, the inverted pyramids). The economics of scale greatly affect how these two classes of...