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Tags: atomic layer deposition

Resources

Online Presentations

  • 9.1 Ranking Hersam: MSE 376 Lecture 1: Film Deposition ...

    MSE 376 Lecture 1: Film Deposition Methods

    Type Online Presentations
    Contributor(s) Mark Hersam
    Date 04 Oct. 2006
    Avg. Rating 4.0 out of 5 stars  (1)
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    ...

  • 8.8 Ranking Ye: Making the Tiniest and Fastest ...

    Making the Tiniest and Fastest Transistor using Atomic Layer Deposition (ALD)

    Type Online Presentations
    Contributor(s) Peide "Peter" Ye
    Date 13 Feb. 2006
    Avg. Rating 5.0 out of 5 stars  (1)
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    Atomic layer deposition (ALD) is an emerging nanotechnology, which is a surface controlled self-limiting process and enables us to deposit ultrathin films one atomic layer by one atomic layer. ALD provides an unprecedented and powerful capability to grow or regrow nanoscale ultrathin films ...

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